Search

Low-density plasma is generated in a cylindrical DC magnetron discharge tube. Distribution of the magnetic field strengths in the radial and axial directions is drawn. Langmuir probe data are obtained at the edge of the cathode fall region of Ar gas discharge at pressure range from 0.5 to 4.0 torr. In the presence of the magnetic field, values of the electron temperature Teare smaller than that without magnetic field. While plasma density Neincreases by a factor of two than that without magnetic field. The electron density increases with magnetic field due to electron magnetic confinement. Also, the radial distribution of Teand Nein the cathode fall region of the glow discharge is discussed. The magnetic field drift velocity plays an important role to make the radial distribution of Teand Neslightly changed.