1. Variation of Vanadium Incorporation in Semi-Insulating SiC Single Crystals Grown by PVT Method
- Author
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Lee, Chae Young, Choi, Jeong Min, Kim, Dae Sung, Park, Mi Seon, Jang, Yeon Suk, Lee, Won Jae, Yang, In Seok, Kim, Tae Hee, Chen, Xiu Fang, and Xu, Xian Gang
- Abstract
Two SiC crystals were grown using SiC source powder with different level of purity and then the effect of the purity of SiC source materials on the final electrical properties has been systematically observed. Furthermore, the variation of vanadium amount according to the growth direction of vanadium doped semi-insulated SiC single crystals has been investigated. The quality of SiC crystal grown using SiC source powder with higher purity was definitely better than SiC crystal with lower purity. SiC crystals having an average resistivity value of about 1×10
10 Ωcm were successfully obtained. In the result of COREMA measurement, the use of high purity SiC powder was revealed to obtain wafers with better uniformity in resistivity value.- Published
- 2019
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