1. MEMS plasmonic switch with stripe plasmonic waveguide
- Author
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Ando, Toshinari, Kaji, Takahiro, Yamaguchi, Kenzo, Suzuki, Katsuyori, Kamada, Shun, Okamoto, Toshihiro, Mori, Atushi, and Haraguchi, Masanobu
- Abstract
In this study, we fabricated a plasmonic waveguide switch combining MEMS with a stripe plasmonic waveguide for optical signal processing using electron-beam lithography. The outgoing waveguide was moved by the electrostatic attractive force of the comb-teeth portion, and the ON/OFF states of the output light were switched by the connection and disconnection of the incoming and outgoing waveguides. A high ON/OFF ratio of 16 dB was obtained for the proposed switch structure through finite-difference time-domain simulations. Equivalent circuit analyses showed that the drive voltage and the resonance frequency were approximately 17.5 V and 28.5 kHz, respectively. We confirmed the ON/OFF switching operation experimentally at a drive voltage of 17.5 V. We believe that such an active device can contribute to the development of an optical integrated circuit.
- Published
- 2018