1. A Novel Sloped Field Plate-Enhanced Ultra-Short Edge Termination Structure
- Author
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Yang, Wentao, Feng, Hao, Fang, Xiangming, Onozawa, Yuichi, Tanaka, Hiroyuki, Sin, Johnny Kin On, Yang, Wentao, Feng, Hao, Fang, Xiangming, Onozawa, Yuichi, Tanaka, Hiroyuki, and Sin, Johnny Kin On
- Abstract
A novel sloped field plate (FP)-enhanced ultra-short edge termination structure is proposed and experimentally demonstrated. The structure features a benzocyclobutene dielectric filled trench, and is fabricated along with a high-voltage p-i-n diode. In addition, a sloped FP is put inside the trench and connected to the anode electrode. The fabricated device shows a breakdown voltage of 755 V, and is confirmed as the ideal planar junction breakdown voltage of the p-i-n diode. The proposed edge termination structure has a total width of 35 mu m, which is similar to 1/5 the size of a conventional termination structure using the guard rings approach.
- Published
- 2016