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Magnetic anisotropy of Permalloy (Py) antidot square lattice was investigated by torquemetry method using Rotation Magneto-Optic Kerr Effect (ROTMOKE). We find that there exists a field-dependent 4-fold magnetic anisotropy with the easy magnetization axis along the [11] axis of the antidot square lattice. In addition, there also exists an artifact of a uniaxial magnetic anisotropy in ROTMOKE result. We show that both results are due to the period wiggling of the magnetization in space which was confirmed by magnetic imaging using magnetic transmission soft x-ray microscopy (MTXM). Micromagnetic simulation from MuMax3 supports the wiggling structure of the magnetization, as well as reproduces ROTMOKE result. A simplified model was developed based on the periodic wiggling of the magnetization and successfully explored the physical origin of the field-dependent 4-fold anisotropy and the artifact of the uniaxial anisotropy.

Harmonic oscillation of spin structures is a physical phenomenon that offers great potential for applications in nanotechnologies such as nano-oscillators and bio-inspired computing. The effective tuning of oscillations over wide frequency ranges within a single ferromagnetic nanoelement is a prerequisite to realize oscillation-based nanodevices, but it has not been addressed experimentally or theoretically. Here, utilizing a vortex core structure, one of spin structures, we report a drastic change of oscillation modes over the frequency range from MHz to sub-GHz in a 100 nm-thick permalloy circular disk. Oscillation mode was found to considerably depend on the shape and dimension of the vortex core structure and various oscillation modes over a wide range of frequencies appeared with dimensional change in the vortex core structure. This work demonstrates that oscillation modes of the vortex core structure can be effectively tuned and opens a way to apply spin structures to oscillation-based technology.

Magnetic anisotropy of Permalloy (Py) antidot square lattice was investigated by torquemetry method using Rotation Magneto-Optic Kerr Effect (ROTMOKE). We find that there exists a field-dependent 4-fold magnetic anisotropy with the easy magnetization axis along the [11] axis of the antidot square lattice. In addition, there also exists an artifact of a uniaxial magnetic anisotropy in ROTMOKE result. We show that both results are due to the period wiggling of the magnetization in space which was confirmed by magnetic imaging using magnetic transmission soft x-ray microscopy (MTXM). Micromagnetic simulation from MuMax3 supports the wiggling structure of the magnetization, as well as reproduces ROTMOKE result. A simplified model was developed based on the periodic wiggling of the magnetization and successfully explored the physical origin of the field-dependent 4-fold anisotropy and the artifact of the uniaxial anisotropy.

Accurate topography measurements of engineered surfaces over a wide range of spatial frequencies are required in many applications. The instrument transfer function (ITF) of the microscope used to characterize the surface topography must be taken into consideration to ensure that the height, or depth, of features with higher spatial frequency content is not underestimated. This applies especially when comparing surface topography measurements made by different types of microscopes. We discuss ITF measurements of a confocal microscope and an interferometric microscope using a binary pseudo-random array (BPRA) standard. BPRA standards are surfaces designed to have constant inherent power spectral density (PSD) over the spatial frequency passband of a microscope. The ITF of a microscope can thus be derived from a PSD measurement of a BPRA standard in a straight-forward manner. We further show how BPRA standards can be used as efficient diagnostic tools to characterize aspects of the imaging performance of topography-measuring microscopes.

The reliability of the instrument transfer function (ITF) calibration technique based on binary pseudo-random array (BPRA) standards is investigated and demonstrated in application to interferometric microscopes. We demonstrate the linearity of the calibration (that is, independence of the ITF calibration on the standards root-mean-square roughness) via comparison of the ITF measurements with a number of artifacts with the etched depth varying from 30 nm to 120 nm. We also show that the calibration does not depend on the surface reflectivity, at least in the range between ∼36% and ∼80%. The criteria for selection of the geometrical parameters of the BPRA standard design appropriate for a particular interferometric microscope arrangement (including optical magnification), as well as the data acquisition and analysis procedures for different applications are also discussed.

High-accuracy surface metrology is vitally important in manufacturing ultra-high-quality free-form mirrors designed to manipulate x-ray light with nanometer-scale wavelengths. The current capabilities and possibility for improvements in x-ray mirror manufacturing are limited by inherent imperfections of the integrated metrology tools. Metrology tools are currently calibrated with super-polished flat test-standard/reference mirrors. This is acceptable for fabrication of slightly curved x-ray optics. However, for even moderately curved aspherical x-ray mirrors the flat-reference calibration is not sufficiently accurate. In the case of micro-stitching interferometry developed for surface measurements with curved xray mirrors, the tool aberration errors are known to be transferred into the optical surface topography of x-ray mirrors. Our approach to improvement of the metrology is to thoroughly calibrate the measuring tool and apply the results of the calibration to gain the reliability of the metrology via calibration-based deconvolution of the measured data. Thus, we explore the application of a recently developed technique for calibrating the instrument's transfer function (ITF) of 3D optical surface profilers to the metrology with significantly curved x-ray optics. The technique, based on test standards structured as two-dimensional (2D) binary pseudo-random arrays (BPRAs), employs the unique properties of the BPRA patterns in the spatial frequency domain. The inherent 2D power spectral density of the pattern has a deterministic whitenoise-like character that allows direct determination of the ITF with uniform sensitivity over the entire spatial frequency range and field-of-view of an instrument. The high efficacy of the technique has been previously demonstrated in application to metrology with flat and slightly curved optics. Here, we concentrate on development of an efficient fabrication process for production of highly randomized (HR) BPRA test standards on flat

The non-trivial topology of magnetic structures such as vortices and skyrmions is considered as a key concept to explain the stability of those structures. The stability, dictated by non-trivial topology, provides great potential for device applications. Although it is a very critical scientific and technological issue, it is elusive to experimentally study the topology-dependent stability owing to the difficulties in establishing stably formed magnetic structures with different topologies. Here, we establish a platform for vortex-antivortex structures with different topological charges within Ni80Fe20 rectangular elements thick enough to stabilize a unique three-dimensional magnetic structure with non-uniform magnetization along the thickness of the elements. The detailed magnetization configurations of the three-dimensional vortex-antivortex structures and their annihilations during their field-driven motions are investigated by utilizing magnetic transmission soft x-ray microscopy and micromagnetic simulation. We demonstrate that the stability of vortex-antivortex structures significantly depends on their topologies and the topology-dependent stability is associated with their different annihilation mechanisms. We believe that this work provides in-depth insight into the stability of magnetic structures and its topology dependence.

Stochasticity in magnetic nanodevices is an essential characteristic for harnessing these devices to computing based on population coding or the building blocks of probabilistic computing, p-bits. A magnetic tunneling junction (MTJ) consisting of a patterned magnetic element is considered a promising computing unit in the concept of artificial neurons and p-bits. A comprehensive understanding of the stochasticity in the switching of patterned magnetic elements is crucial for realizing MTJ-based probabilistic computing technology. In the present work, the stochastic behavior in the switching process of a perpendicularly magnetized Co/Pt disk within an array was directly observed utilizing full-field soft X-ray microscopy. Within 50 repeated hysteretic cycles, the stochastic magnetization switching of individual Co/Pt disks within disk arrays is identified. We found that the stochasticity in the magnetization switching of disks considerably depends on the disk size. The stochasticity initially decreases as the disk radius gets bigger from 125 to 375 nm (region I), then increases with further enlarging the disk size to 625 nm (region II). The variance of thermal fluctuation relevant to the disk size and the multilevel switching within a disk are severely involved in the observed size-dependent stochasticity. This work provides the way for controlling the stochasticity in the switching of nanopatterned elements, which is a key aspect of MTJ-based probabilistic computing.

Stochasticity in magnetic nanodevices is an essential characteristic for harnessing these devices to computing based on population coding or the building blocks of probabilistic computing, p-bits. A magnetic tunneling junction (MTJ) consisting of a patterned magnetic element is considered a promising computing unit in the concept of artificial neurons and p-bits. A comprehensive understanding of the stochasticity in the switching of patterned magnetic elements is crucial for realizing MTJ-based probabilistic computing technology. In the present work, the stochastic behavior in the switching process of a perpendicularly magnetized Co/Pt disk within an array was directly observed utilizing full-field soft X-ray microscopy. Within 50 repeated hysteretic cycles, the stochastic magnetization switching of individual Co/Pt disks within disk arrays is identified. We found that the stochasticity in the magnetization switching of disks considerably depends on the disk size. The stochasticity initially decreases as the disk radius gets bigger from 125 to 375 nm (region I), then increases with further enlarging the disk size to 625 nm (region II). The variance of thermal fluctuation relevant to the disk size and the multilevel switching within a disk are severely involved in the observed size-dependent stochasticity. This work provides the way for controlling the stochasticity in the switching of nanopatterned elements, which is a key aspect of MTJ-based probabilistic computing.

The non-trivial topology of magnetic structures such as vortices and skyrmions is considered as a key concept to explain the stability of those structures. The stability, dictated by non-trivial topology, provides great potential for device applications. Although it is a very critical scientific and technological issue, it is elusive to experimentally study the topology-dependent stability owing to the difficulties in establishing stably formed magnetic structures with different topologies. Here, we establish a platform for vortex-antivortex structures with different topological charges within Ni80Fe20 rectangular elements thick enough to stabilize a unique three-dimensional magnetic structure with non-uniform magnetization along the thickness of the elements. The detailed magnetization configurations of the three-dimensional vortex-antivortex structures and their annihilations during their field-driven motions are investigated by utilizing magnetic transmission soft x-ray microscopy and micromagnetic simulation. We demonstrate that the stability of vortex-antivortex structures significantly depends on their topologies and the topology-dependent stability is associated with their different annihilation mechanisms. We believe that this work provides in-depth insight into the stability of magnetic structures and its topology dependence.

Ultrathin films and multilayers, with controlled thickness down to single atomic layers, are critical for advanced technologies ranging from nanoelectronics to spintronics to quantum devices. However, for thicknesses less than 10 nm, surfaces and dopants contribute significantly to the film properties, which can differ dramatically from that of bulk materials. For amorphous films being developed as low dielectric constant interfaces for nanoelectronics, the presence of surfaces or dopants can soften films and degrade their mechanical performance. Here we use coherent short-wavelength light to fully and nondestructively characterize the mechanical properties of individual films as thin as 5 nm within a bilayer. In general, we find that the mechanical properties depend both on the amount of doping and the presence of surfaces. In very thin (5-nm) silicon carbide bilayers with low hydrogen doping, surface effects induce a substantial softening - by almost an order of magnitude - compared with the same doping in thicker (46-nm) bilayers. These findings are important for informed design of ultrathin films for a host of nano- and quantum technologies, and for improving the switching speed and efficiency of next-generation electronics.

The efficient generation, manipulation and detection of magnetic skyrmions are important for the development of future spintronic devices. One approach is to use electric-current-induced spin torques. Recently, thermally induced skyrmion motion has also been observed, but wider experimental evidence and its capabilities remain limited. Here we report the thermal generation, manipulation and thermoelectric detection of nanoscale skyrmions in microstructured metallic multilayers integrated with on-chip heaters. The local application of heat can facilitate a domain morphological transition and the formation of skyrmions at the device edge, where a low energy barrier exists. We observe the unidirectional diffusion of skyrmions from hot regions to cold regions, which is due to the interplay among the repulsive forces between skyrmions, thermal spin–orbit torques, entropic forces and magnonic spin torques. The thermally generated skyrmions can also be electrically detected via the Nernst voltage.

A method for performing X-ray absorption spectroscopy (XAS) in the soft X-ray region was developed to investigate the surface-sensitive electron signal of electrode/electrolyte interfaces in common multivalent based organic solvents under in situ/operando conditions. Our approach enables us to probe the molecular-scale structure of electrode interfaces by measuring total electron yield and is suitable for redox systems exhibiting low intrinsic electrochemical current. In-situ F K-edge XAS measurements in a 0.5 M Magnesium bis(trifluoromethanesulfonimide)/2-Methyltetrahydrofuran (Mg(TFSI)2/2-MeTHF) electrolyte were carried out to determine the evolution of interfacial species during the electrochemical charging/discharging process. Time-dependent density-functional theory (TD-DFT) simulation indicate that the F K-edge evolution is the result of interfacial chemical environment change driven by electrochemical potential. In addition, we performed the “operando XAS” which runs the CV and collects spectra simultaneously. By using this method, the non-equilibrium state of condensed matter interfaces and interfacial dynamical transient process can be revealed.

Ultrathin films and multilayers, with controlled thickness down to single atomic layers, are critical for advanced technologies ranging from nanoelectronics to spintronics to quantum devices. However, for thicknesses less than 10 nm, surfaces and dopants contribute significantly to the film properties, which can differ dramatically from that of bulk materials. For amorphous films being developed as low dielectric constant interfaces for nanoelectronics, the presence of surfaces or dopants can soften films and degrade their mechanical performance. Here we use coherent short-wavelength light to fully and nondestructively characterize the mechanical properties of individual films as thin as 5 nm within a bilayer. In general, we find that the mechanical properties depend both on the amount of doping and the presence of surfaces. In very thin (5-nm) silicon carbide bilayers with low hydrogen doping, surface effects induce a substantial softening - by almost an order of magnitude - compared with the same doping in thicker (46-nm) bilayers. These findings are important for informed design of ultrathin films for a host of nano- and quantum technologies, and for improving the switching speed and efficiency of next-generation electronics.

The efficient generation, manipulation and detection of magnetic skyrmions are important for the development of future spintronic devices. One approach is to use electric-current-induced spin torques. Recently, thermally induced skyrmion motion has also been observed, but wider experimental evidence and its capabilities remain limited. Here we report the thermal generation, manipulation and thermoelectric detection of nanoscale skyrmions in microstructured metallic multilayers integrated with on-chip heaters. The local application of heat can facilitate a domain morphological transition and the formation of skyrmions at the device edge, where a low energy barrier exists. We observe the unidirectional diffusion of skyrmions from hot regions to cold regions, which is due to the interplay among the repulsive forces between skyrmions, thermal spin–orbit torques, entropic forces and magnonic spin torques. The thermally generated skyrmions can also be electrically detected via the Nernst voltage.

A method for performing X-ray absorption spectroscopy (XAS) in the soft X-ray region was developed to investigate the surface-sensitive electron signal of electrode/electrolyte interfaces in common multivalent based organic solvents under in situ/operando conditions. Our approach enables us to probe the molecular-scale structure of electrode interfaces by measuring total electron yield and is suitable for redox systems exhibiting low intrinsic electrochemical current. In-situ F K-edge XAS measurements in a 0.5 M Magnesium bis(trifluoromethanesulfonimide)/2-Methyltetrahydrofuran (Mg(TFSI)2/2-MeTHF) electrolyte were carried out to determine the evolution of interfacial species during the electrochemical charging/discharging process. Time-dependent density-functional theory (TD-DFT) simulation indicate that the F K-edge evolution is the result of interfacial chemical environment change driven by electrochemical potential. In addition, we performed the “operando XAS” which runs the CV and collects spectra simultaneously. By using this method, the non-equilibrium state of condensed matter interfaces and interfacial dynamical transient process can be revealed.

Recently, a technique for calibrating the modulation transfer function (MTF) of a broad variety of metrology instrumentation has been demonstrated. This technique is based on test samples structured as one-dimensional binary pseudo-random (BPR) sequences and two-dimensional BPR arrays (BPRAs). The inherent power spectral density of BPR gratings (sequences) and arrays has a deterministic white-noise-like character that allows direct determination of the MTF with uniform sensitivity over the entire spatial frequency range and field-of-view of an instrument. As such, the BPR samples satisfy the characteristics of a test standard: functionality, ease of specification and fabrication, reproducibility, and low sensitivity to manufacturing error. Here we discuss our recent developments directed to the optimization of the sample design, fabrication, application, and data processing procedures, suitable for thorough characterization of large aperture optical interferometers. Compared with the previous coded-aperture based design, the improved, 'highly randomized' BPRA pattern of the new test standard provides better accuracy and reliability of instrument MTF and aberration characterization, and enables operation optimization of large aperture optical interferometers. We describe the pattern generation algorithm and tests to verify the compliance to desired BPRA topography. The data acquisition and analysis procedures for different applications of the technique are also discussed.

ForestGEO is a network of scientists and long-term forest dynamics plots (FDPs) spanning the Earth's major forest types. ForestGEO's mission is to advance understanding of the diversity and dynamics of forests and to strengthen global capacity for forest science research. ForestGEO is unique among forest plot networks in its large-scale plot dimensions, censusing of all stems ≥1 cm in diameter, inclusion of tropical, temperate and boreal forests, and investigation of additional biotic (e.g., arthropods) and abiotic (e.g., soils) drivers, which together provide a holistic view of forest functioning. The 71 FDPs in 27 countries include approximately 7.33 million living trees and about 12,000 species, representing 20% of the world's known tree diversity. With >1300 published papers, ForestGEO researchers have made significant contributions in two fundamental areas: species coexistence and diversity, and ecosystem functioning. Specifically, defining the major biotic and abiotic controls on the distribution and coexistence of species and functional types and on variation in species' demography has led to improved understanding of how the multiple dimensions of forest diversity are structured across space and time and how this diversity relates to the processes controlling the role of forests in the Earth system. Nevertheless, knowledge gaps remain that impede our ability to predict how forest diversity and function will respond to climate change and other stressors. Meeting these global research challenges requires major advances in standardizing taxonomy of tropical species, resolving the main drivers of forest dynamics, and integrating plot-based ground and remote sensing observations to scale up estimates of forest diversity and function, coupled with improved predictive models. However, they cannot be met without greater financial commitment to sustain the long-term research of ForestGEO and other forest plot networks, greatly expanded scientific capa

The quantitative functions for climate damages provide theoretical ground for the cost-benefit analysis in climate change economics, and they are also critical for linking climate module with economic module in the Integrated Assessment Models (IAMs). Nevertheless, it is necessary for IAMs to update sectoral climate impacts in order to catch up the advance in climate change studies. This study updates the sectoral climate damage function at global scale from climate Framework for Uncertainty, Negotiation and Distribution (FUND) model and develops the aggregate climate damage function in a bottom-up fashion. Besides conventional sectors such as agriculture, forestry, water resources, energy consumption and ecosystems, this study expands climate disaster types, assesses human health impacts caused by various air pollutants, and updates coastal damage by sea level rise. The Beijing Climate Center Simple Earth System Model (BCC_SESM) is used to project climate system based on Business-as-Usual (BAU) scenario, and the 2 °C and 1.5 °C scenarios based on RCPs and SSP2 databases. Sectoral results show that the agricultural sector is projected to suffer 63% of the total damage, followed by water resources (16%) and human health (12%) sectors in 2100. The regression results indicate that the aggregate climate damage function is in positive quadratic form. Under BAU scenario, the aggregate climate damage is projected to be 517.7 trillion USD during 2011‒2100. Compared to that, the 2°C and 1.5°C scenarios are projected to respectively reduce climate damages by 215.6 trillion USD (approximately 41.6%) and 263.5 trillion USD (50.9%) in 2011‒2100.

The quantitative functions for climate damages provide theoretical ground for the cost-benefit analysis in climate change economics, and they are also critical for linking climate module with economic module in the Integrated Assessment Models (IAMs). Nevertheless, it is necessary for IAMs to update sectoral climate impacts in order to catch up the advance in climate change studies. This study updates the sectoral climate damage function at global scale from climate Framework for Uncertainty, Negotiation and Distribution (FUND) model and develops the aggregate climate damage function in a bottom-up fashion. Besides conventional sectors such as agriculture, forestry, water resources, energy consumption and ecosystems, this study expands climate disaster types, assesses human health impacts caused by various air pollutants, and updates coastal damage by sea level rise. The Beijing Climate Center Simple Earth System Model (BCC_SESM) is used to project climate system based on Business-as-Usual (BAU) scenario, and the 2 °C and 1.5 °C scenarios based on RCPs and SSP2 databases. Sectoral results show that the agricultural sector is projected to suffer 63% of the total damage, followed by water resources (16%) and human health (12%) sectors in 2100. The regression results indicate that the aggregate climate damage function is in positive quadratic form. Under BAU scenario, the aggregate climate damage is projected to be 517.7 trillion USD during 2011‒2100. Compared to that, the 2°C and 1.5°C scenarios are projected to respectively reduce climate damages by 215.6 trillion USD (approximately 41.6%) and 263.5 trillion USD (50.9%) in 2011‒2100.

The quantitative functions for climate damages provide theoretical ground for the cost-benefit analysis in climate change economics, and they are also critical for linking climate module with economic module in the Integrated Assessment Models (IAMs). Nevertheless, it is necessary for IAMs to update sectoral climate impacts in order to catch up the advance in climate change studies. This study updates the sectoral climate damage function at global scale from climate Framework for Uncertainty, Negotiation and Distribution (FUND) model and develops the aggregate climate damage function in a bottom-up fashion. Besides conventional sectors such as agriculture, forestry, water resources, energy consumption and ecosystems, this study expands climate disaster types, assesses human health impacts caused by various air pollutants, and updates coastal damage by sea level rise. The Beijing Climate Center Simple Earth System Model (BCC_SESM) is used to project climate system based on Business-as-Usual (BAU) scenario, and the 2 °C and 1.5 °C scenarios based on RCPs and SSP2 databases. Sectoral results show that the agricultural sector is projected to suffer 63% of the total damage, followed by water resources (16%) and human health (12%) sectors in 2100. The regression results indicate that the aggregate climate damage function is in positive quadratic form. Under BAU scenario, the aggregate climate damage is projected to be 517.7 trillion USD during 2011‒2100. Compared to that, the 2°C and 1.5°C scenarios are projected to respectively reduce climate damages by 215.6 trillion USD (approximately 41.6%) and 263.5 trillion USD (50.9%) in 2011‒2100.

Merons which are topologically equivalent to one-half of skyrmions can exist only in pairs or groups in two-dimensional (2D) ferromagnetic (FM) systems. The recent discovery of meron lattice in chiral magnet Co8Zn9Mn3 raises the immediate challenging question that whether a single meron pair, which is the most fundamental topological structure in any 2D meron systems, can be created and stabilized in a continuous FM film? Utilizing winding number conservation, we develop a new method to create and stabilize a single pair of merons in a continuous Py film by local vortex imprinting from a Co disk. By observing the created meron pair directly within a magnetic field, we determine its topological structure unambiguously and explore the topological effect in its creation and annihilation processes. Our work opens a pathway towards developing and controlling topological structures in general magnetic systems without the restriction of perpendicular anisotropy and Dzyaloshinskii-Moriya interaction.

Nanoscale thermal transport is becoming ever more technologically important with the development of next-generation nanoelectronics, nanomediated thermal therapies, and high efficiency thermoelectric devices. However, direct experimental measurements of nondiffusive heat flow in nanoscale systems are challenging, and first-principle models of real geometries are not yet computationally feasible. In recent work, we used ultrafast pulses of short-wavelength light to uncover a previously-unobserved regime of nanoscale thermal transport that occurs when the width and separation of heat sources are comparable to the mean free paths of the dominant heat-carrying phonons in the substrate. We now systematically compare thermal transport from gratings of metallic nanolines with different periodicities, on both silicon and fused-silica substrates, to map the entire nanoscale thermal transport landscape - from closely spaced through increasingly isolated to fully isolated heat-transfer regimes. By monitoring the surface profile dynamics with subangstrom sensitivity, we directly measure thermal transport from the nanolines into the substrate. This allows us to quantify for the first time how the nanoline separation significantly impacts thermal transport into the substrate, making it possible to reach efficiencies that are within a factor of 2 of the diffusive (i.e., thin-film) limit. We also show that partially isolated nanolines perform significantly worse, because cooling occurs in a regime that is intermediate between close-packed and fully isolated heat sources. This work thus confirms the surprising prediction that closely spaced nanoscale heat sources can cool more quickly than when far apart. These results show that our predictive model is validated by experiment over a broad parameter space, which is important for benchmarking theories that go beyond the Fourier model of heat diffusion, and for informed design of nanoengineered systems.

An ongoing collaboration among four US Department of Energy (DOE) National Laboratories has demonstrated key technology prototypes and software modeling tools required for new high-coherent flux beamline optical systems. New free electron laser (FEL) and diffraction-limited storage ring (DLSR) light sources demand wavefront preservation from source to sample to achieve and maintain optimal performance. Fine wavefront control was achieved using a novel, roomtemperature cooled mirror system called REAL (resistive element adjustable length) that combines cooling with applied, spatially variable auxiliary heating. Single-grating shearing interferometry (also called Talbot interferometry) and Hartmann wavefront sensors were developed and used for optical characterization and alignment on several beamlines, across a range of photon energies. Demonstrations of non-invasive hard x-ray wavefront sensing were performed using a thin diamond single-crystal as a beamsplitter.

The Berkeley MET5, funded by EUREKA, is a 0.5-NA EUV projection lithography tool located at the Advanced Light Source at Berkeley National Lab. Wavefront measurements of the MET5 optic have been performed using a custom in-situ lateral shearing interferometer suitable for high-NA interferometry. In this paper, we report on the most recent characterization of the MET5 optic demonstrating an RMS wavefront 0.31 nm, and discuss the specialized mask patterns, gratings, and illumination geometries that were employed to accommodate the many challenges associated with high-NA EUV interferometry.

The Sharp High-NA Actinic Reticle review Project (SHARP) is a synchrotron-based, extreme ultraviolet (EUV) microscope dedicated to photomask research. A potential upgrade to the SHARP microscope is presented. The upgrade includes changing the light path in the instrument from its current off-Axis configuration to an on-Axis configuration. This change allows for an increased working distance of 2.5 mm or more. A central obscuration, added to the zoneplate aperture, blocks stray light from reaching the central part of the image, thus improving the image contrast. The imaging performance of the two configurations is evaluated by means of ray tracing.

Nanoscale thermal transport is becoming ever more technologically important with the development of next-generation nanoelectronics, nanomediated thermal therapies, and high efficiency thermoelectric devices. However, direct experimental measurements of nondiffusive heat flow in nanoscale systems are challenging, and first-principle models of real geometries are not yet computationally feasible. In recent work, we used ultrafast pulses of short-wavelength light to uncover a previously-unobserved regime of nanoscale thermal transport that occurs when the width and separation of heat sources are comparable to the mean free paths of the dominant heat-carrying phonons in the substrate. We now systematically compare thermal transport from gratings of metallic nanolines with different periodicities, on both silicon and fused-silica substrates, to map the entire nanoscale thermal transport landscape - from closely spaced through increasingly isolated to fully isolated heat-transfer regimes. By monitoring the surface profile dynamics with subangstrom sensitivity, we directly measure thermal transport from the nanolines into the substrate. This allows us to quantify for the first time how the nanoline separation significantly impacts thermal transport into the substrate, making it possible to reach efficiencies that are within a factor of 2 of the diffusive (i.e., thin-film) limit. We also show that partially isolated nanolines perform significantly worse, because cooling occurs in a regime that is intermediate between close-packed and fully isolated heat sources. This work thus confirms the surprising prediction that closely spaced nanoscale heat sources can cool more quickly than when far apart. These results show that our predictive model is validated by experiment over a broad parameter space, which is important for benchmarking theories that go beyond the Fourier model of heat diffusion, and for informed design of nanoengineered systems.

The Sharp High-NA Actinic Reticle review Project (SHARP) is a synchrotron-based, extreme ultraviolet (EUV) microscope dedicated to photomask research. A potential upgrade to the SHARP microscope is presented. The upgrade includes changing the light path in the instrument from its current off-Axis configuration to an on-Axis configuration. This change allows for an increased working distance of 2.5 mm or more. A central obscuration, added to the zoneplate aperture, blocks stray light from reaching the central part of the image, thus improving the image contrast. The imaging performance of the two configurations is evaluated by means of ray tracing.

The Berkeley MET5, funded by EUREKA, is a 0.5-NA EUV projection lithography tool located at the Advanced Light Source at Berkeley National Lab. Wavefront measurements of the MET5 optic have been performed using a custom in-situ lateral shearing interferometer suitable for high-NA interferometry. In this paper, we report on the most recent characterization of the MET5 optic demonstrating an RMS wavefront 0.31 nm, and discuss the specialized mask patterns, gratings, and illumination geometries that were employed to accommodate the many challenges associated with high-NA EUV interferometry.

An ongoing collaboration among four US Department of Energy (DOE) National Laboratories has demonstrated key technology prototypes and software modeling tools required for new high-coherent flux beamline optical systems. New free electron laser (FEL) and diffraction-limited storage ring (DLSR) light sources demand wavefront preservation from source to sample to achieve and maintain optimal performance. Fine wavefront control was achieved using a novel, roomtemperature cooled mirror system called REAL (resistive element adjustable length) that combines cooling with applied, spatially variable auxiliary heating. Single-grating shearing interferometry (also called Talbot interferometry) and Hartmann wavefront sensors were developed and used for optical characterization and alignment on several beamlines, across a range of photon energies. Demonstrations of non-invasive hard x-ray wavefront sensing were performed using a thin diamond single-crystal as a beamsplitter.

Merons which are topologically equivalent to one-half of skyrmions can exist only in pairs or groups in two-dimensional (2D) ferromagnetic (FM) systems. The recent discovery of meron lattice in chiral magnet Co8Zn9Mn3 raises the immediate challenging question that whether a single meron pair, which is the most fundamental topological structure in any 2D meron systems, can be created and stabilized in a continuous FM film? Utilizing winding number conservation, we develop a new method to create and stabilize a single pair of merons in a continuous Py film by local vortex imprinting from a Co disk. By observing the created meron pair directly within a magnetic field, we determine its topological structure unambiguously and explore the topological effect in its creation and annihilation processes. Our work opens a pathway towards developing and controlling topological structures in general magnetic systems without the restriction of perpendicular anisotropy and Dzyaloshinskii-Moriya interaction.

We describe design guidelines for soft x-ray wavefront sensors and experimentally demonstrate their performance, comparing grating-based lateral shearing interferometry and Hartmann wavefront sensing. We created a compact shearing interferometer concept with a dense array of binary amplitude gratings in a single membrane to support one-dimensional wavefront measurements across a wide wavelength range without the need for longitudinal position adjustment. We find that a common scaling parameter based on wavelength and the distance to the measurement plane guides the design of both systems toward optimal sensitivity. We show preliminary results from recent experiments demonstrating one and two-dimensional wavefront sensing below the Marechal criterion.

The topological spin textures in magnetic vortices in confined magnetic elements offer a platform for understanding the fundamental physics of nanoscale spin behavior and the potential of harnessing their unique spin structures for advanced magnetic technologies. For magnetic vortices to be practical, an effective reconfigurability of the two topologies of magnetic vortices, that is, the circularity and the polarity, is an essential prerequisite. The reconfiguration issue is highly relevant to the question of whether both circularity and polarity are reliably and efficiently controllable. In this work, we report the first direct observation of simultaneous control of both circularity and polarity by the sole application of an in-plane magnetic field to arrays of asymmetrically shaped permalloy disks. Our investigation demonstrates that a high degree of reliability for control of both topologies can be achieved by tailoring the geometry of the disk arrays. We also propose a new approach to control the vortex structures by manipulating the effect of the stray field on the dynamics of vortex creation. The current study is expected to facilitate complete and effective reconfiguration of magnetic vortex structures, thereby enhancing the prospects for technological applications of magnetic vortices.

A Fresnel zoneplate is a diffractive optical element consisting of concentric rings (zones) for which the transmitted light produces a focal spot that is used in all wavelength regimes, including X-rays. The pattern of transmission openings determines the location of the spot and the sub-half wavelength size of the openings can adjust the intensity. Today, very general transmission zoneplate patterns are used for many special imaging and image compensation purposes. Manufacturing zoneplates require a zoneplate pattern file, which precisely describes the size, shape, and contour of the rings based on the desired optical properties of the lens. Generating such a pattern requires the delicate balance of achieving the required optical performance while maintaining manageable file sizes and computation times. Here we describe a new algorithm meeting these needs. By precisely controlling the number of shapes in each zone, the algorithm simultaneously optimizes the desired optical tolerances with the pattern file size.

The topological spin textures in magnetic vortices in confined magnetic elements offer a platform for understanding the fundamental physics of nanoscale spin behavior and the potential of harnessing their unique spin structures for advanced magnetic technologies. For magnetic vortices to be practical, an effective reconfigurability of the two topologies of magnetic vortices, that is, the circularity and the polarity, is an essential prerequisite. The reconfiguration issue is highly relevant to the question of whether both circularity and polarity are reliably and efficiently controllable. In this work, we report the first direct observation of simultaneous control of both circularity and polarity by the sole application of an in-plane magnetic field to arrays of asymmetrically shaped permalloy disks. Our investigation demonstrates that a high degree of reliability for control of both topologies can be achieved by tailoring the geometry of the disk arrays. We also propose a new approach to control the vortex structures by manipulating the effect of the stray field on the dynamics of vortex creation. The current study is expected to facilitate complete and effective reconfiguration of magnetic vortex structures, thereby enhancing the prospects for technological applications of magnetic vortices.

A Fresnel zoneplate is a diffractive optical element consisting of concentric rings (zones) for which the transmitted light produces a focal spot that is used in all wavelength regimes, including X-rays. The pattern of transmission openings determines the location of the spot and the sub-half wavelength size of the openings can adjust the intensity. Today, very general transmission zoneplate patterns are used for many special imaging and image compensation purposes. Manufacturing zoneplates require a zoneplate pattern file, which precisely describes the size, shape, and contour of the rings based on the desired optical properties of the lens. Generating such a pattern requires the delicate balance of achieving the required optical performance while maintaining manageable file sizes and computation times. Here we describe a new algorithm meeting these needs. By precisely controlling the number of shapes in each zone, the algorithm simultaneously optimizes the desired optical tolerances with the pattern file size.

The charge-exchange (p, n) reaction at 220 MeV has been measured to extract the strength distribution of Gamow-Teller transitions from the doubly magic unstable nucleus 132Sn. A recently developed experimental technique of measuring the (p, n) reaction in inverse kinematics has been applied to the study of unstable nuclei in the mass region around A∼100 for the first time. We have combined the low-energy neutron detector WINDS and the SAMURAI spectrometer at the RIKEN radioactive isotope beam factory (RIBF). The particle identification plot for the reaction residues obtained by the spectrometer provides the clear separation of the CE reaction channel from other background events, enabling us to identify kinematic curves corresponding the (p, n) reaction. Further analysis to reconstruct the excitation energy spectrum is ongoing.

The SHARP high-numerical aperture actinic reticle review project is a synchrotron-based, extreme ultraviolet (EUV) microscope dedicated to photomask research. SHARP emulates the illumination and imaging conditions of current EUV lithography scanners and those several generations into the future. An anamorphic imaging optic with increased mask-side numerical aperture (NA) in the horizontal and increased demagnification in the vertical direction has been proposed to overcome limitations of current multilayer coatings and extend EUV lithography beyond 0.33 NA. Zoneplate lenses with an anamorphic 4×/8× NA of 0.55 are fabricated and installed in the SHARP microscope to emulate anamorphic imaging. SHARP's Fourier synthesis illuminator with a range of angles exceeding the collected solid angle of the newly designed elliptical zoneplates can produce arbitrary angular source spectra matched to anamorphic imaging. A target with anamorphic dense features down to 50-nm critical dimension is fabricated using 40 nm of nickel as the absorber. In a demonstration experiment, anamorphic imaging at 0.55 4×/8× NA and 6 deg central ray angle (CRA) is compared with conventional imaging at 0.5 4× NA and 8 deg CRA. A significant contrast loss in horizontal features is observed in the conventional images. The anamorphic images show the same image quality in the horizontal and vertical directions.

The problem of stochastics in photoresist patterning is gaining increased attention. Understanding this problem requires new modeling methods. Here we describe the use of the Multivariate Poisson Propagation Model (MPPM) to study the relative importance of a variety of stochastic terms in both chemically amplified and non-chemically amplified resists. The results show that for the chemically amplified case, materials stochastic effects are on par with photon stochastics effects. The model is used to study both line-width roughness (LWR) impacts as well as contact size variations (CDU). As one might expect, contact CDU follows the same trends as LWR, but places even more sever constraints on the stochastic terms when considering the same feature size. Noting the contact patterning challenge, we also describe a phase-shift mask patterning method enabling the photon effect to be greatly reduced. At equivalent CDU, we demonstrate an effective 7x reduction in required source dose when patterning 25-nm half pitch contacts.

The SHARP high-numerical aperture actinic reticle review project is a synchrotron-based, extreme ultraviolet (EUV) microscope dedicated to photomask research. SHARP emulates the illumination and imaging conditions of current EUV lithography scanners and those several generations into the future. An anamorphic imaging optic with increased mask-side numerical aperture (NA) in the horizontal and increased demagnification in the vertical direction has been proposed to overcome limitations of current multilayer coatings and extend EUV lithography beyond 0.33 NA. Zoneplate lenses with an anamorphic 4×/8× NA of 0.55 are fabricated and installed in the SHARP microscope to emulate anamorphic imaging. SHARP's Fourier synthesis illuminator with a range of angles exceeding the collected solid angle of the newly designed elliptical zoneplates can produce arbitrary angular source spectra matched to anamorphic imaging. A target with anamorphic dense features down to 50-nm critical dimension is fabricated using 40 nm of nickel as the absorber. In a demonstration experiment, anamorphic imaging at 0.55 4×/8× NA and 6 deg central ray angle (CRA) is compared with conventional imaging at 0.5 4× NA and 8 deg CRA. A significant contrast loss in horizontal features is observed in the conventional images. The anamorphic images show the same image quality in the horizontal and vertical directions.

The problem of stochastics in photoresist patterning is gaining increased attention. Understanding this problem requires new modeling methods. Here we describe the use of the Multivariate Poisson Propagation Model (MPPM) to study the relative importance of a variety of stochastic terms in both chemically amplified and non-chemically amplified resists. The results show that for the chemically amplified case, materials stochastic effects are on par with photon stochastics effects. The model is used to study both line-width roughness (LWR) impacts as well as contact size variations (CDU). As one might expect, contact CDU follows the same trends as LWR, but places even more sever constraints on the stochastic terms when considering the same feature size. Noting the contact patterning challenge, we also describe a phase-shift mask patterning method enabling the photon effect to be greatly reduced. At equivalent CDU, we demonstrate an effective 7x reduction in required source dose when patterning 25-nm half pitch contacts.

With the slipping of the insertion node for extreme ultraviolet lithography, demands on resist resolution have increased further stressing sensitivity requirements. A variety of resists, both chemically amplified and not, have been developed meeting resolution needs, but falling short on sensitivity and line-width roughness (LWR). Note that resolution is an absolute mandatory requirement, the true tradeoff that must be considered is between sensitivity and contact hole printing is a crucial application for extreme ultraviolet lithography and is particularly challenged by resist sensitivity due to inherent inefficiencies in darkfield contact printing. Checkerboard strong phase shift masks have the potential to alleviate this problem through a 4× increase in optical efficiency. The feasibility of this method is demonstrated using the SEMATECH-Berkeley Microfield Exposure Tool pseudo phase shift mask configuration and preliminary results are provided on the fabrication of an etched multilayer checkerboard phase shift mask.

Progress in the ultimate performance of extreme ultraviolet resist has arguably decelerated in recent years suggesting an approach to stochastic limits both in photon counts and material parameters. Here we report on the performance of a variety of leading extreme ultraviolet resist both with and without chemical amplification. The measured performance is compared to stochastic modeling results using the Multivariate Poisson Propagation Model. The results show that the best materials are indeed nearing modeled performance limits.

With the slipping of the insertion node for extreme ultraviolet lithography, demands on resist resolution have increased further stressing sensitivity requirements. A variety of resists, both chemically amplified and not, have been developed meeting resolution needs, but falling short on sensitivity and line-width roughness (LWR). Note that resolution is an absolute mandatory requirement, the true tradeoff that must be considered is between sensitivity and contact hole printing is a crucial application for extreme ultraviolet lithography and is particularly challenged by resist sensitivity due to inherent inefficiencies in darkfield contact printing. Checkerboard strong phase shift masks have the potential to alleviate this problem through a 4× increase in optical efficiency. The feasibility of this method is demonstrated using the SEMATECH-Berkeley Microfield Exposure Tool pseudo phase shift mask configuration and preliminary results are provided on the fabrication of an etched multilayer checkerboard phase shift mask.

Progress in the ultimate performance of extreme ultraviolet resist has arguably decelerated in recent years suggesting an approach to stochastic limits both in photon counts and material parameters. Here we report on the performance of a variety of leading extreme ultraviolet resist both with and without chemical amplification. The measured performance is compared to stochastic modeling results using the Multivariate Poisson Propagation Model. The results show that the best materials are indeed nearing modeled performance limits.

© 2015 Geological Society of America. Increasingly detailed studies of out crops of high-pressure rock terranes in combination with rapidly evolving numerical modeling studies have given rise to a number of possible explanations for the processes by which these rocks are exhumed. Imaging actively exhuming high-pressure terranes remains one of the fundamental, but elusive, tasks that could advance the understanding of how these important rocks reach Earth's surface. Seismic tomography along the active arc-continent collision in eastern Taiwan images a high P- and S-wave velocity zone that extends from the shallow subsurface beneath a high-pressure metamorphic terrane to ~50 km depth. We present a petrophysical analysis of this high-velocity zone that indicates the presence of rock types common to high-pressure terranes. The high-velocity zone is seismically active throughout. We determine focal mechanisms for 57 earthquakes, and carry out full waveform modeling on 10; these have double-couple focal mechanisms with a compensated linear vector dipole component up to 20.6%. We suggest that the high-velocity zone comprises an exhuming high-pressure terrane. Focal mechanisms for earthquakes within it indicate that shear faulting dominates in the deformation, but high fluid pressure may also play a role.