Two research areas in the field of biomedical engineering that have progressed significantly and garnered a great deal of interest in recent years are electroporation and biosensors. Electroporation has found wide usage in microbiology and cellular manipulation. Conventional or “bulk” electroporation (BEP) is the most commonly employed electroporation technique, and while it is easy to use and able to transfect a large cell population, it suffers a variety of drawbacks such as high voltage levels (resulting in low transfection efficiency due to cellular damage) and non-uniform biasing applied to the target cell population. 2D Micro-electroporation (MEP) and its successor 2D nano-electroporation (NEP) allow for control over delivery dosage and uniform biasing of target cell populations, but at low throughput. The first portion of this Ph. D. research uses Bosch etching process, which is optimized and characterized with respect to etch rate, etching parameters, and feature size to create a 3D NEP silicon platform that conserves the best attributes of both 2D NEP and BEP. Before device fabrication, a Bosch etching process is optimized and characterized with respect to etch rate, etching parameters, and feature size. The 3D NEP device is evaluated to ensure it possesses the “hallmark” benefits of NEP such as dosage control, good transfection uniformity, and high cell viability in a high throughput system. Simulations are performed and corresponding experiments are run to determine the ideal voltage for optimizing these parameters. As a result of this research the following have been achieved, (1) a tracked-etched membrane (which suffered from randomized nano-channel locations and thus poor throughput) is no longer the only available 3D NEP-style system. (2) The design and creation of this 3D NEP device allows the user to have dosage control, high cell viability, and uniform transfection for a large cell population. (3) A high-throughput 3D NEP system is now available for the transfection of delicate cell types that do not respond well to conventional electroporation or other cell transfection approaches. (4) While previous 2D NEP devices were limited to in vitro applications due to low throughout and the device layout itself, the 3D NEP chip’s design and high throughput capability allows it to be utilized for in vivo applications and by extension, open entirely new avenues for the usage of NEP. This includes, but is not limited to, the delivery of transcription factors into living organisms and the ability to control therapeutic dosages. Indeed, this has already been used for successful in vivo delivery of transcription factors to enhance wound healing in a murine model. Lastly, (5) the well-characterized Bosch etching process allows the devices to be easily replicated and produced by other audiences unfamiliar with the process. The methodology herein also allows straightforward tailoring of the recipe in the event of shifting machine conditions. The second part of this research investigates an aluminum gallium nitride/gallium nitride (AlGaN/GaN) heterostructure field-effect transistor (FET) platform for biosensing applications. Over the years, many semiconductor-based biosensors have been employed for the detection of a variety of analytes such as proteins, DNA, and bacteria. More recently, amidst growing concerns of algal blooms and by extension, their associated toxins in drinking water supplies, there is a critical need of sensors that are easy-to-use for rapid and sensitive detection of cyanobacterial toxins produced from harmful algae blooms (HABs). To address this, an AlGaN/GaN immunologically modified field effect transistor (immunoFET) is developed for the detection and quantification of algal toxins, specifically microcystin-LR (MC-LR) and saxitoxin. Herein, a four-parameter logistic model is used to relate the device output (normalized current) to microcystin-LR concentration, and subsequently, compare the accuracy, precision, and limit of detection to the `standard’ ELISA and other USEPA (United States Environmental Protection Agency). As with any new technique, it is prudent to both compare and validate it against accepted existing methodologies. The final aim is to create a “point-of-care” (POC) immunoFET system that is able to quantify toxin concentrations in a given aqueous sample in real-time without laboratory processing. Many sensors reported in the literature have an array of desirable characteristics, such as high sensitivity, fast response time, excellent precision, and point-of-care diagnostic capabilities, but few reported devices excel in all four areas. In addition, even fewer show the ability to detect multiple toxins with high sensitivity in real-time within a variety of sample solutions. As on-site detection of cyanotoxins requires the sensor to operate in a variety of aqueous samples, 1/f noise investigations are performed to determine the effects of ionic strength on device signal-to-noise ratio. The following are determined to serve as guide both for this research and for other individuals performing biosensing measurements. (1) The sub-threshold regime is compared to the saturation regime with respect to signal-to-noise ratio (SNR) and it is determined that the sub-threshold regime has higher SNR by approximately two orders for these devices. (2) When dealing with ionic strengths above ~9×1014/ml, the characteristic frequency exponent β begins increasing from 1 to 2 with increasing ion concentration if the gate voltage is sufficiently high (|Vg| > 1). Thus, when performing biosensing measurements, it would be prudent to keep ionic strengths and/or gate biases low if possible. These findings allow for the optimization of measurements conditions and combined with the fabricated AlGaN/GaN FET sensors, results in a cyanotoxin biosensor platform with the following benefits – (a) label-free detection, (b) real-time measurement results within 12-13 minutes, (c) a limit of detection (LOD) determined to be 153 fg/L for microcystin-LR, (d) validated against ELISA, and (e) CV (coefficient of variation) values ranging from 2.53% to 12.12% with only one measurement condition (17.25%) exceeding the USEPA 15% threshold. For saxitoxin, a normalize device response of 0.3 is observed for 1 pg/L saxitoxin in phosphate buffered saline (PBS) These attributes make these sensors comparable to the best reported devices in the literature and the only devices (to our knowledge) shown to successfully detect two types of cyanobacterial toxins (microcystin-LR and saxitoxin) in multiple sample solutions (water, PBS, and murine serum). While sensitivity is reduced for detection in murine serum for both toxins, the devices show successful response down to 1 ng/L concentrations. This concentration is lower than ELISAs LOD and makes these devices suitable for cyanobacterial toxin detection for clinical applications when toxin exposure is suspected. Lastly, the devices are made to be compatible with a microfluidic, portable platform prototype so that with further optimization, these sensors could offer unprecedented diagnostic capabilities for the detection of cyanobacterial toxins on-site with similar accuracy and significantly higher sensitivity compared to ELISA.