Author: "Yaohua Mai" / Publication Type: Conference Materials - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Yaohua Mai"' showing total 3 results

Start Over Author "Yaohua Mai" Publication Type Conference Materials

3 results on '"Yaohua Mai"'

1. Investigation on the role of oxygen in μc-Si:H thin film and its deposition process with VHF-PECVD.

Author: Huidong Yang, Chunya Wu, Yaohua Mai, Hongbo Li, Yan Li, Xinhua Geng, Ying Zhao, and Shaozhen Xiong
Published: 2002
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2. Modulation effect of plasma power on crystalline volume fraction of silicon films in the phase transition from a-Si:H to /spl mu/c-Si:H.

Author: Xinhua Geng, Yaohua Mai, Guofu Hou, Ying Zhao, Junming Xue, Xiaodan Zhang, Huizhi Ren, Jian Sun, and Dekun Zhang
Published: 2003

3. Investigation on the role of oxygen in /spl mu/c-Si:H thin film deposited with VHF-PECVD.

Author: Huidong Yang, Chunya Wu, Yaohua Mai, Xiaodan Zhang, Guofu Hou, Junming Xue, Ying Zhao, Xinhua Geng, and Shaozhen Xiong
Published: 2003

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