9 results on '"Thompson, Larry F."'
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2. Initial manufacturing performance of an actively controlled PBS resist development process
3. Evaluation of a laser-based proximity x-ray stepper
4. Initial manufacturing performance of an actively controlled PBS resist development process.
5. Evaluation of a laser-based proximity x-ray stepper.
6. Development of a chemically amplified positive resist material for single-layer deep-UV lithography.
7. Investigation of the exposure and bake of a positive acting resist with chemical amplification.
8. Single-component chemically amplified resist materials for electron-beam and x-ray lithography
9. Preliminary lithographic characteristics of an all-organic chemically amplified resist formulation for single-layer deep-UV lithography
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