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In this paper we present custom designed, fully automated UV holographic lithography system based on Lloyd's mirror geometry. This system was used to record 1D and 2D periodic patterns with periodicity of 265 nm in positive and negative tone photoresists. Produced structures were investigated with atomic force and scanning electron microscopes. These regular structures with sub-wavelength periodicities can be used as refractive index sensor chips. [ABSTRACT FROM AUTHOR]

In this work application of a motorized goniometric measurement setup with an automated spectra acquisition for determination of the optical constants (Brewster angle) is presented. Angular dependencies of reflectance for two model materials were measured for s and p polarizations. The Brewster angles of 55.92 ° and 57.13 ° at 589.29 nm wavelength were determined for fused silica and indium tin oxide film. Experimental and theoretical angular dependencies of reflectance obtained for the fused silica and indium tin oxide film were compared using Pearson product-moment correlation coefficient. [ABSTRACT FROM AUTHOR]

Yttria stabilized zirconia films were prepared by sol-gel technique on Si substrates and sintered at 1200°C. Sol-gel method is simple, although it has a drawback - high porosity of the film. Laser irradiation is one of the promising ways to improve the density of layers. In this contribution, densification of the YSZ ceramic surface was performed by laser melting technique. Laser irradiation of a Q-switched diode-pumped nanosecond Nd:YAG laser (NL220/SH, Ekspla) which generated at the wavelength of 532 nm and a pulse length was of approximately 9 ns was used. Irradiated areas of YSZ layer were analyzed by scanning electron microscopy (SEM) and light reflection spectroscopy (350 to 800 nm). [ABSTRACT FROM AUTHOR]

In this study, the SiOx doped diamond like carbon layers were formed employing hexamethyldisiloxane and acetylene carrier gas in a closed drift ion beam deposition system. Films were deposited varying ion beam energy from 300 eV to 800eV. Optical and surface wetting properties of the films were investigated. It was observed that change of ion beam energy does not have a major influence on the optical properties of the films but wetting properties of the films varied with ion beam energy and the contact angle of water for the films changed from 65° to 77°. [ABSTRACT FROM AUTHOR]

In this work we present a low cost and high throughput interference lithography method for fabrication of one-dimensional and two-dimensional periodical structures with submicrometer features. Interference patterns of He-Cd laser beams were recorded in ma-P 1205 photoresist layer by two-beam interference technique with double exposure. Varying the angle between two exposures from 15 ° to 90 ° provided different periodical structures, i.e. sticks, squares. Fabricated structures were investigated employing optical and scanning electron microscopes. [ABSTRACT FROM AUTHOR]

Barium cerate substituted with yttria (BCY) demonstrates high proton conductivity with low activation energy, and thus is a potential candidate as electrolyte in intermediate temperature solid oxide fuel cells (SOFC). In this contribution the proton conductivity of BCY doped with different concentrations of yttria (5, 10 and 20 mol%) was investigated. Proton conductivity of isostatically pressed pellets was measured by electrochemical impedance spectroscopy in dry and wet nitrogen atmospheres. It was found that the substitution level has significant influence on the bulk conductivity, whereas atmosphere has little influence. In contrast, the effect of the atmosphere for conductivity of grain boundaries is significant. [ABSTRACT FROM AUTHOR]

The laser processing was applied to YSZ - NiO - Ni coatings, which were prepared by plasma spray technique. The laser processing was accomplished with the second-harmonics Nd: YVO4 laser (532 nm) with 10 kHz repetition frequency and pulse duration of 10 ns. Laser parameters effect for processing of composite coatings was found out by applying different laser fluences (1.57 - 6.07 J/cm²) and different count of pulses. The diameter and shape of the drilled holes were analyzed with a scanning electron and confocal microscopes. It was found that geometrical dimensions of the drilled holes are dependent on the laser energy and vary non-monotonously with the number of pulses. [ABSTRACT FROM AUTHOR]

In this work tin doped indium oxide (ITO) thin films were deposited onto soda lime glass substrates by direct current magnetron sputtering system analyzing process of deposition with optical emission spectroscopy (OES). The dependence of electro-optical characteristics of the deposited films on the O2/Ar working gas flow ratio and the discharge power was investigated. The X-ray photoelectron spectroscopy (XPS) method was applied for analysis of thin films surface chemical composition. It was found that in-situ measuring of plasma emission spectra allowed prediction and control of parameters of ITO thin films namely resistivity and transparency. The correlation between the thin films resistivity and optical transparency and kinetics of deposition was examined. [ABSTRACT FROM AUTHOR]

In this study, micropattern in silicon was formed employing conventional contact lithography and reactive ion etching with SF6 gas. Afterwards silicon template was used as a stamp for replication in UV curable polymer. Reverse structure (640 nm depth and 1 μm width holes) was transferred into 2-2-dimethoxy-2-phenylacetoplenon employing UV curing. Replicated structure can be used as a template for particle self-assembly via capillary force assisted particle assembly route. [ABSTRACT FROM AUTHOR]

Polarization state of interfering beams are important parameters for structures quality in holographic lithography technology. Simulation of interference fields created by three symmetrically oriented interfering beams with different (linear) polarization orientations was demonstrated in the current work. It was shown that polarization orientation between interfering beams in HL multi-beam systems has high influence on obtained field intensity distribution and its contrast, thus have to be controlled in order to get high quality structures. [ABSTRACT FROM AUTHOR]

Array of few micron sized holes in biocompatible polyimide film was patterned employing femotsecond laser microfabrication workstation. Quality of the structure was evaluated with scanning electron and optical microscopes, while mechanical properties of the membrane were simulated employing finite element method. [ABSTRACT FROM AUTHOR]

Guided mode resonance structures were fabricated and applied for on-line refractive index sensing. The method was applied for monitoring of biological reactions. Optical responds from the regular structures was simulated and explained employing different numerical solvers. The method demonstrated better then 10-4 refractive index sensitivity. [ABSTRACT FROM AUTHOR]

Getters are materials able to fix residual gas molecules on their surface in the form of stable chemical compounds and thereby maintain the desired vacuum. Over the years manufacturers have constantly improved the quality and life time of vacuum systems, because outgassing from surfaces destroy the vacuum over time. In order to assure long-term vacuum evaporable barium getters are routinely used. In this work, thermal evaporation method has been used to deposit thin films of barium getter on glass substrates. The absorption spectra were measured with Avantes photo spectrometer and investigated in order to analyze the optical characteristics of the films. The XRD analysis was performed to identity phase composition of the films and relation to optical properties. [ABSTRACT FROM AUTHOR]