Author: "Shin, Donghun" / Publication Type: Conference Materials - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Shin, Donghun"' showing total 3 results

Start Over Author "Shin, Donghun" Publication Type Conference Materials

3 results on '"Shin, Donghun"'

1. Analysis method to define photoresist resolution in EUV lithography

Author: Seo, Yongbeom, primary, Go, Heeyoung, additional, Lee, Jinseong, additional, Oh, Tae-Hwan, additional, Shin, Donghun, additional, Shin, Huiseob, additional, Lee, Jisun, additional, Kim, Sang-Jin, additional, Kim, Insung, additional, and Park, Chang-min, additional
Published: 2023
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2. Novel circular fringe projection method using conical mirror

Author: Shin, Donghun, primary and Hyun, Jae-Sang, additional
Published: 2023
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3. Analysis method to define photoresist resolution in EUV lithography.

Author: Seo, Yongbeom, Go, Heeyoung, Lee, Jinseong, Oh, Taehwan, Shin, Donghun, Shin, Huiseob, Lee, Jisun, Kim, Sangjin, Kim, In-sung, and Park, Changmin
Published: 2023
Full Text: View/download PDF

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