22 results on '"Sakai, Fumio"'
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2. Defectivity and particle reduction for mask life extension, and imprint mask replication for high-volume semiconductor manufacturing
3. The gonality of singular plane curves II
4. Non-destructive inspection system for special nuclear material using inertial electrostatic confinement fusion neutrons and Laser Compton Scattering Gamma-rays
5. Immersion exposure tool for 45-nm HP mass production
6. Diode-pumped Yb:S-FAP CPA laser system for laser-Compton x-ray generation
7. Synchronization of two different repetition-rate mode-locked laser oscillators for laser-Compton x-ray generation
8. Status of laser-Compton x-ray generation project for FESTA
9. Development of diode-pumped Yb:S-FAP laser system for laser-Compton X-ray generation
10. Thermal distortion of wavefront in high-intensity-laser system for inverse Compton x-ray generation
11. Next-generation scanner to sub-100-nm lithography
12. Immersion exposure tool for 45-nm HP mass production.
13. Fluctuation of femtosecond x-ray pulses generated by a laser-Compton scheme
14. Electron-beam excited Ce:LiCAF spectroscopy by a table-top-sized, low-jitter, 3-MeV picosecond electron- beam source with a photo cathode
15. Development of high-brightness hard x-ray source by Laser-Compton scattering.
16. Synchronization of two different repetition-rate mode-locked laser oscillators for laser-Compton x-ray generation.
17. Status of laser-Compton x-ray generation project for FESTA.
18. Characterization of the monochromatic laser Compton x-ray beam with picosecond and femtosecond pulse widths
19. New scanners for the 100-nm era
20. Development of a picosecond Nd:YLF amplifier for laser-Compton x-ray generator
21. New scanners for the 100-nm era.
22. Laser synchrotron femtosecond x-ray source for novel imaging.
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