1. Simulation of surface sputtering of fused quartz by clusters of different gases.
- Author
-
Nikolaev, I. V., Stishenko, P. V., Korobeishchikov, N. G., and Yakovlev, V. V.
- Subjects
FUSED silica ,SOLID rare gases ,MOLECULAR dynamics ,ION beams ,COMPLEX ions - Abstract
The use of gas cluster ion beams makes it possible to diagnose and uniquely modify the surfaces of different materials. In this work, the influence of neon, argon, and krypton clusters on silicon dioxide is studied by the molecular dynamics method. The interaction of noble gases with solid is simulation at oblique incidence and with the following cluster parameters: cluster size N = 561 atom/cluster and total kinetic cluster energy E = 22 keV. Different selectivity of sputtering is revealed and images of the cross-section of craters with different gases are presented. Among the sputtered products, the oxygen atoms are predominated. It is shown that the heavier the cluster, the less the depth of the resulting crater. [ABSTRACT FROM AUTHOR]
- Published
- 2023
- Full Text
- View/download PDF