Author: "Hur, Jiuk" / Publication Type: Conference Materials - Searchworks@Jio Institute Digital Library Search Results

Searchworks

Select search scope, currently: Articles

Catalog

books, media & more in Jio Institute collections

Articles

journal articles & other e-resources

Your search keyword '"Hur, Jiuk"' showing total 7 results

Start Over Author "Hur, Jiuk" Publication Type Conference Materials

7 results on '"Hur, Jiuk"'

1. Teron 647e next-generation system for advanced EUV mask inspection

Author: Jain, Priyank, primary, Chen, Dongxue, additional, Kwon, Eric, additional, Huang, Harry, additional, Hur, JiUk, additional, Chung, Yura, additional, Jang, Sieun, additional, Lee, JuHyoung, additional, and Chung, Paul, additional
Published: 2023
Full Text: View/download PDF

2. Improving mask yield by implementing an advanced mask blank inspection system

Author: Inderhees, Gregg A., primary, Kalsbeck, Bill, primary, Tan, Alexander, primary, Chung, Paul, primary, Hur, JiUk, primary, Kwon, Eric, primary, Choo, Min, primary, Cho, Wonil, primary, Jang, IlYong, primary, Kang, In-Yong, primary, Seo, JeongHun, primary, Jeon, Chan-Uk, primary, and Son, Suein, primary
Published: 2018
Full Text: View/download PDF

3. MTO-like reference mask modeling for advanced inverse lithography technology patterns

Author: Park, Jongju, additional, Moon, Jongin, additional, Son, Suein, additional, Chung, Donghoon, additional, Kim, Byung-Gook, additional, Jeon, Chan-Uk, additional, LoPresti, Patrick, additional, Xue, Shan, additional, Wang, Sonny, additional, Broadbent, Bill, additional, Kim, Soonho, additional, Hur, Jiuk, additional, and Choo, Min, additional
Published: 2017
Full Text: View/download PDF

4. A novel design-based global CDU metrology for 1X nm node logic devices

Author: Yoon, Young-Keun, primary, Chung, Dong H., additional, Kim, Min-Ho, additional, Seo, Jung-Uk, additional, Kim, Byung-Gook, additional, Jeon, Chan-Uk, additional, Hur, JiUk, additional, Cho, Wonil, additional, and Yamamoto, Tetsuya, additional
Published: 2013
Full Text: View/download PDF

5. Improving inspectability of sub-2x-nm node masks with complex SRAF

Author: Kang, In Yong, primary, Yoon, Gisung, additional, Lee, Jonghee, additional, Chung, Donghoon Paul, additional, Kim, Byung-Gook, additional, Jeon, Chan-Uk, additional, Inderhees, Gregg, additional, Hutchinson, Trent, additional, Cho, Wonil, additional, and Hur, Jiuk, additional
Published: 2013
Full Text: View/download PDF

6. Implementation strategy of wafer-plane and aerial-plane inspection for advanced mask manufacture

Author: Kim, Won-Sun, primary, Chung, Dong-Hoon, additional, Jeon, Chan-Uk, additional, Cho, HanKu, additional, Huang, William, additional, Miller, John, additional, Inderhees, Gregg, additional, Pinto, Becky, additional, Hur, Jiuk, additional, Park, Kihun, additional, and Han, Jay, additional
Published: 2009
Full Text: View/download PDF

7. Implementation strategy of wafer-plane and aerial-plane inspection for advanced mask manufacture.

Author: Kim, Won-Sun, Chung, Dong-Hoon, Jeon, Chan-Uk, Cho, HanKu, Huang, William, Miller, John, Inderhees, Gregg, Pinto, Becky, Hur, Jiuk, Park, Kihun, and Han, Jay
Published: 2009
Full Text: View/download PDF

Catalog

Books, media, physical & digital resources

See catalog results