11 results on '"Delobelle Patrick"'
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2. Interferometry system for the mechanical characterization of membranes with silicon oxynitride thin films fabricated by PECVD
3. Active damping with piezoelectric MEMS devices.
4. Evaluation of the mechanical properties of square membranes prestressed by PECVD silicon oxynitride thin films.
5. Interferometry system for the mechanical characterization of membranes with silicon oxynitride thin films fabricated by PECVD.
6. Electromechanical characterization of screen-printed PZT thick films.
7. Interferometric method for characterizing the mechanical properties of thin films by bulging tests
8. Interferometric analysis of strained thin silicon films
9. Optical methods for the characterization of mechanical properties of thin silicon films
10. Interferometric method for characterizing the mechanical properties of thin films by bulging tests.
11. Optical methods for the characterization of mechanical properties of thin silicon films.
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