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Recently, there are many researches on the design of RF probes. Usually the materials of RF probe are tungsten and copper beryllium. They employed fabrication process of soldering and drawing of metal wire, which are not compatible with MEMS or IC fabrication process. Precise and high skill assembly is needed to finish the final probe module therefore results in high cost. This paper presents a novel RF probe module design which can be fabricated by Micro Electro Mechanical (MEM) fabrication process to reduce the cost. We use microwave simulation software, such as IE3D, Microwave Office, and Fidelity for design and analysis, and to know what kind of probe can reach the optimal impedance match and S-parameter. The design flow chart is coaxial cable to transform square coaxial cable, finally, in order to match up CPW standard pitches, therefore, design rectangular coaxial transition and success suitable ratio. Probe can match 50?. [ABSTRACT FROM PUBLISHER]