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A high precision Micro-CMM (Coordinate measuring machine) is introduced for the 3D measurement of part dimensions in meso to micro scale. Expected measuring range is 20×20×10 mm and the resolution is 1 nm. In order to enhance the structural accuracy, some new ideas are integrated into the design, such as the semi-circular shape bridge for better stiffness and the co-planar stage for less Abbé error. The ultrasonic motor and linear diffraction grating interferometer are used to drive the stage and feedback the position to the control. Some problems due to current techniques are also addressed. [ABSTRACT FROM AUTHOR]