23 results on '"Voelskow, M."'
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2. Crystallization of InSb Phase Near the Bonding Interface of Silicon-on-Insulator Structure
3. SiGe Heterostructures-on-Insulator Produced by Ge+-Ion Implantation and Subsequent Hydrogen Transfer
4. High Dose High Temperature Ion Implantation of Ge into 4H-SiC
5. Epitaxial SiC Formation at the SiO2/Si Interface by C+ Implantation into SiO2 and Subsequent Annealing
6. A Thermal Model for Flash Lamp Annealing of 3C-SiC/Si Multi-Layer Systems (i-FLASiC)
7. Ion beam synthesis by tungsten-implantation into 6H—silicon carbide
8. Ion Beam Induced Epitaxial Crystallization of SiC: Fluence -and Temperature Dependence
9. FORMATION OF BURIED SILICON NITRIDE AND OXYNITRIDE LAYERS IN SILICON BY ION BEAM SYNTHESIS
10. ION BEAM INDUCED EPITAXIAL CRYSTALLIZATION OF DOPED AMORPHOUS SILICON LAYERS
11. Epitaxial Regrowth of Amorphous or Polycrystalline Silicon Layers on Silicon Single Crystals and Bridging Epitaxy by Flash Lamp Irradiation
12. EPITAXIAL LATERAL OVERGROWTH OF AMORPHOUS CVD SILICON FILMS INDUCED BY ION IRRADIATION
13. Electrical Properties of Ion Implanted and Short Time Annealed Polycrystalline Silicon
14. OPTIMIZED SO I-PROCESS I NB BY ION BEAM SYNTHESIS OF BURIED SILICON OXYNITRIDE IN SILICON
15. Flash Lamp Annealing of Arsenic Implanted Silicon
16. Pulsed Incoherent Light Annealing of Arsenic and Phosphorus Implanted Polycrystalline Silicon
17. In situ RECRYSTALLIZATION OF IMPLANTED Si IN A HIGH-VOLTAGE ELECTRON MICROSCOPE
18. Annealing Characteristics of SiO2 -Si Structures after Incoherent Light Pulse Processing
19. Dopant Redistribution after Flash Lamp Annealing
20. Low-Energy Implantation of Arsenic in Silicon
21. High-Speed Electron Beam Annealing of Arsenic and Gallium Implanted Silicon
22. Lattice Location Determination of Ge in SiC by ALCHEMI
23. Epitaxial Lateral Overgrowth of Amorphous Cvd Silicon Films Induced by Ion Irradiation
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