6 results on '"Vandeweyer, T."'
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2. Challenges in using optical lithography for the building of a 22 nm node 6T-SRAM cell
3. Spacer defined FinFET: Active area patterning of sub-20 nm fins with high density
4. Advanced Cu interconnects using air gaps
5. In-Line Metrology for Characterization and Control of Extreme Wafer Thinning of Bonded Wafers.
6. In-line metrology for characterization and control of extreme wafer thinning of bonded wafers.
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