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Abstract  In a close collaboration the team of Micromotion, micro resist technology, BESSY, and LSU-CAMD have successfully mastered the challenges of LIGA production of ultra-precision microparts for Micro Harmonic Drive® gears. The complementary expertise ranging from design and application know-how to process research and technical support resulted in high quality LIGA microparts and superior Micro Harmonic Drive® gears taking advantages of the free 2D design capability and material choice. It is also an excellent example that through contributions from partners with different background and expertise LIGA precision parts can be produced with high quality and yield and for a market competitive price. [ABSTRACT FROM AUTHOR]

Purpose - Until now, the size range of most machines for precision assembly was much larger than the size of the pieces to be handled or the necessary workspace. Flexibly scalable miniaturised production machines can help to develop much more flexible micro production systems. The paper aims to describe the development of a micro-parallel-SCARA robot adapted in size to MEMS products. Design/methodology/approach - The robot consists of a miniaturised parallel structure, which provides a high level of accuracy in a workspace of 60?Î?45?Î?20?mm3. It has a base area of 130?Î?170?mm2 and offers four degrees of freedom. Findings - Based on simulations, the degree of miniaturisation in terms of a smaller structure and a high level of accuracy is determined. The results show that a miniaturised hybrid robot with a plane parallel structure driven by miniaturised zero-backlash gears and electric motors can reach a theoretical repeatability better than 1?Ám. Research limitations/implications - The first prototype provides good prospects that the concept will be used in a visionary desktop-factory. As regards the accuracy parameters of the robot, there will be further efforts to optimise the robot's structure and drive mechanism. Practical implications - The repeatability of this first prototype is better than 14?Ám. A better stiffness of optimised micro-gears and joints of the structure will guarantee a much better repeatability. Originality/value - The paper illustrates that the Parvus is one of the smallest industrial robots for micro assembly equipped with a full range of functionalities like conventional industrial robots. [ABSTRACT FROM AUTHOR]