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1. On the Finite-Element Analysis of Resonance MEMS Structures based on Acoustic Lamb Waves.

Author

Marinushkin, Pavel S., Levitsky, Alexey A., Zograf, Fyodor G., and Bakhtina, Valentina A.

Subjects
MICROELECTROMECHANICAL systems, FINITE element method, SOUND waves, LAMB waves, PIEZOELECTRIC materials, ELECTROMECHANICAL effects
Abstract

Copyright of Informacije MIDEM: Journal of Microelectronics, Electronic Components & Materials is the property of MIDEM Society and its content may not be copied or emailed to multiple sites or posted to a listserv without the copyright holder's express written permission. However, users may print, download, or email articles for individual use. This abstract may be abridged. No warranty is given about the accuracy of the copy. Users should refer to the original published version of the material for the full abstract. (Copyright applies to all Abstracts.)

Published
2020
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