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The surface texture characteristics are specified by international standards, which include dozens of parameters, basically geometrical. The probability of filling the rough surface layer with a material from the reference line and through the layer thickness is proposed as a quantitative roughness assessment. It takes account of geometrical parameters, shape, height and frequency of surface irregularities. An example is given of studying a surface with processing defects, and a comparative analysis of surface treatment methods is presented. The calculation results are summarized in a table of probabilistic characteristics of surfaces for various processing methods.