Author: "Ki-Hyun Hwang" / Publication Type: Academic Journals - Searchworks@Jio Institute Digital Library Search Results

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Start Over Author "Ki-Hyun Hwang" Publication Type Academic Journals

Author: Ki-Hyun Hwang and Euijoon Yoon
Subjects: *SURFACE roughness measurement, *ATOMIC force microscopy
Abstract: Examines the temperature of surface roughness and defect morphology in electron cyclotron resonance hydrogen plasma cleaning at low temperatures. Analysis on the effect of parameters process on surface roughness by atomic force microscopy; Purpose of studying crystalline defect morphology; Link of surface roughness to the nucleation and growth of platelet defects.
Published: 1995
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