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Viral outbreaks can cause widespread disruption, creating the need for diagnostic tools that provide high performance and sample versatility at the point of use with moderate complexity. Current gold standards such as PCR and rapid antigen tests fall short in one or more of these aspects. Here, we report a label-free and amplification-free nanopore sensor platform that overcomes these challenges via direct detection and quantification of viral RNA in clinical samples from a variety of biological fluids. The assay uses an optofluidic chip that combines optical waveguides with a fluidic channel and integrates a solid-state nanopore for sensing of individual biomolecules upon translocation through the pore. High specificity and low limit of detection are ensured by capturing RNA targets on microbeads and collecting them by optical trapping at the nanopore location where targets are released and rapidly detected. We use this device for longitudinal studies of the viral load progression for Zika and Severe Acute Respiratory Syndrome Coronavirus-2 (SARS-CoV-2) infections in marmoset and baboon animal models, respectively. The up to million-fold trapping-based target concentration enhancement enables amplification-free RNA quantification across the clinically relevant concentration range down to the assay limit of RT-qPCR as well as cases in which PCR failed. The assay operates across all relevant biofluids, including semen, urine, and whole blood for Zika and nasopharyngeal and throat swab, rectal swab, and bronchoalveolar lavage for SARS-CoV-2. The versatility, performance, simplicity, and potential for full microfluidic integration of the amplification-free nanopore assay points toward a unique approach to molecular diagnostics for nucleic acids, proteins, and other targets.

We demonstrate an optofluidic device which utilizes the optical scattering and gradient forces for particle trapping in microchannels featuring 300 nm thick membranes. On-chip waveguides are used to direct light into microfluidic trapping channels. Radiation pressure is used to push particles into a protrusion cavity, isolating the particles from liquid flow. Two different designs are presented: the first exclusively uses the optical scattering force for particle manipulation, and the second uses both scattering and gradient forces. Trapping performance is modeled for both cases. The first design, referred to as the orthogonal force design, is shown to have a 80% capture efficiency under typical operating conditions. The second design, referred to as the gradient force design, is shown to have 98% efficiency under the same conditions.

We demonstrate a method for fabricating and utilizing an optofluidic particle manipulator on a silicon chip that features a 300 nm thick silicon dioxide membrane as part of a microfluidic channel. The fabrication method is based on etching silicon channels and converting the walls to silicon dioxide through thermal oxidation. Channels are encapsulated by a sacrificial polymer which fills the length of the fluid channel by way of spontaneous capillary action. The sacrificial material is then used as a mold for the formation of a nanoscale, solid-state, silicon dioxide membrane. The hollow channel is primarily used for fluid and particle transport but is capable of transmitting light over short distances and utilizes radiation pressure for particle trapping applications. The optofluidic platform features solid-core ridge waveguides which can direct light on and off of the silicon chip and intersect liquid channels. Optical loss values are characterized for liquid and solid-core structures and at interfaces. Estimates are provided for the optical power needed to trap particles of various sizes.

Integrated optofluidic biosensors can fill the need for sensitive, amplification-free, multiplex single molecule detection which is relevant for containing the spread of infectious diseases such as COVID-19. Here, we demonstrate a rapid sample-to-answer scheme that uses a field programmable gate array (FPGA) to enable live monitoring of single particle fluorescence analysis on an optofluidic chip. Fluorescent nanobeads flowing through a micro channel are detected with 99% accuracy and particle concentrations in clinically relevant ranges from 3.4×104 to 3.4 × 106/ml are determined within seconds to a few minutes without the need for post-experiment data extraction and analysis. In addition, other extract salient experimental parameters such as dynamic flow rate changes can be monitored in real time. The sensor is validated with real-time fluorescence detection of single bacterial plasmid DNA at attomolar concentrations, showing excellent promise for implementation as a point of care (POC) diagnostic tool.

Ultrasensitive, versatile sensors for molecular biomarkers are a critical component of disease diagnostics and personalized medicine as the COVID-19 pandemic has revealed in dramatic fashion. Integrated electrical nanopore sensors can fill this need via label-free, direct detection of individual biomolecules, but a fully functional device for clinical sample analysis has yet to be developed. Here, we report amplification-free detection of SARS-CoV-2 RNAs with single molecule sensitivity from clinical nasopharyngeal swab samples on an electro-optofluidic chip. The device relies on optically assisted delivery of target carrying microbeads to the nanopore for single RNA detection after release. A sensing rate enhancement of over 2,000x with favorable scaling towards lower concentrations is demonstrated. The combination of target specificity, chip-scale integration and rapid detection ensures the practicality of this approach for COVID-19 diagnosis over the entire clinically relevant concentration range from 104-109 copies/mL.

The advent of single-molecule probing techniques has revolutionized the biomedical and life science fields and has spurred the development of a new class of labs-on-chip based on powerful biosensors. Nanopores represent one of the most recent and most promising single molecule sensing paradigms that is seeing increased chip-scale integration for improved convenience and performance. Due to their physical structure, nanopores are highly sensitive, require low sample volume, and offer label-free, amplification-free, high-throughput real-time detection and identification of biomolecules. Over the last 25 years, nanopores have been extensively employed to detect a variety of biomolecules with a growing range of applicatons ranging from nucleic acid sequencing to ultrasensitive diagnostics to single-molecule biophysics. Nanopores, in particular those in solid-state membranes, also have the potential for integration with other technologies such as optics, plasmonics, microfluidics, and optofluidics to perform more complex tasks for an ever-expanding demand. A number of breakthrough results using integrated nanopore platforms have already been reported, and more can be expected as nanopores remain the focus of innovative research and are finding their way into commercial instruments. This review provides an overview of different aspects and challenges of nanopore technology with a focus on chip-scale integration of solid-state nanopores for biosensing and bioanalytical applications.

We present a method to create robust, nanoscale solid-state membranes using the natural shape of a liquid meniscus as a template. A narrow, open channel is etched into a silicon substrate and then a photoresist polymer is introduced into the channel through spontaneous capillary action. The natural concave meniscus formed by the polymer is then covered by a thin chemical vapor deposited membrane. The polymer is removed by sacrificial etching, leaving behind a suspended membrane. Membranes as large as 20 μm by 9 mm can be fabricated with a thickness as low as 50 nm.

Particle trapping and enrichment into confined volumes can be useful in particle processing and analysis. This review is an evaluation of the methods used to trap and enrich particles into constrained volumes in microfluidic and nanofluidic systems. These methods include physical, optical, electrical, magnetic, acoustic, and some hybrid techniques, all capable of locally enhancing nano- and microparticle concentrations on a microscale. Some key qualitative and quantitative comparison points are also explored, illustrating the specific applicability and challenges of each method. A few applications of these types of particle trapping are also discussed, including enhancing biological and chemical sensors, particle washing techniques, and fluid medium exchange systems. [ABSTRACT FROM AUTHOR]

We report the design, fabrication, and characterization of hollow-core anti-resonant reflecting optical waveguides (ARROWs) fabricated in a membrane-covered trench. These structures are built on silicon wafers using standard microfabrication techniques, including plasma etching, to form trenches. Four waveguide designs are demonstrated, which have different numbers of thin-film reflecting layers. We demonstrate that optical loss decreases with additional reflecting layers, with measured loss coefficients as low as 1 cm−1. [ABSTRACT FROM AUTHOR]

The analysis of individual biological nanoparticles has significantly advanced our understanding of fundamental biological processes but is also rapidly becoming relevant for molecular diagnostic applications in the emerging field of personalized medicine. Both optical and electrical methods for the detection and analysis of single biomolecules have been developed, but they are generally not used in concert and in suitably integrated form to allow for multimodal analysis with high throughput. Here we report on a dual-mode electrical and optical single-nanoparticle sensing device with capabilities that would not be available with each technique individually. The new method is based on an optofluidic chip with an integrated nanopore that serves as a smart gate to control the delivery of individual nanoparticles to an optical excitation region for ensemble-free optical analysis in rapid succession. We demonstrate electro-optofluidic size discrimination of fluorescent nanobeads, electro-optical detection of single fluorescently labeled influenza viruses, and the identification of single viruses within a mixture of equally sized fluorescent nanoparticles with up to 100% fidelity.

Viral outbreaks can cause widespread disruption, creating the need for diagnostic tools that provide high performance and sample versatility at the point of use with moderate complexity. Current gold standards such as PCR and rapid antigen tests fall short in one or more of these aspects. Here, we report a label-free and amplification-free nanopore sensor platform that overcomes these challenges via direct detection and quantification of viral RNA in clinical samples from a variety of biological fluids. The assay uses an optofluidic chip that combines optical waveguides with a fluidic channel and integrates a solid-state nanopore for sensing of individual biomolecules upon translocation through the pore. High specificity and low limit of detection are ensured by capturing RNA targets on microbeads and collecting them by optical trapping at the nanopore location where targets are released and rapidly detected. We use this device for longitudinal studies of the viral load progression for Zika and Severe Acute Respiratory Syndrome Coronavirus-2 (SARS-CoV-2) infections in marmoset and baboon animal models, respectively. The up to million-fold trapping-based target concentration enhancement enables amplification-free RNA quantification across the clinically relevant concentration range down to the assay limit of RT-qPCR as well as cases in which PCR failed. The assay operates across all relevant biofluids, including semen, urine, and whole blood for Zika and nasopharyngeal and throat swab, rectal swab, and bronchoalveolar lavage for SARS-CoV-2. The versatility, performance, simplicity, and potential for full microfluidic integration of the amplification-free nanopore assay points toward a unique approach to molecular diagnostics for nucleic acids, proteins, and other targets. [ABSTRACT FROM AUTHOR]

We present a design and a fabrication method for devices designed for rapid collection of nanoparticles in a fluid. The design uses nanofluidic channels as a passive size-based barrier trap to isolate particles near a central point in the channel, which is also covered by a thin membrane. Particles that enter the collection region are trapped with 100% efficiency within a 6–12 μ m radius from a central point. Flow rates for particle-free fluid range from 1.88 to 3.69 nl/s for the pressure and geometries tested. Particle trapping tests show that high trapped particle counts significantly impact flow rates. For suspensions as dilute as 30–300 aM (20–200 particles/ μ l), 8–80 particles are captured within 500 s. [ABSTRACT FROM AUTHOR]

Over the past decade, optofluidics has established itself as a new and dynamic research field for exciting developments at the interface of photonics, microfluidics, and the life sciences. The strong desire for developing miniaturized bioanalytic devices and instruments, in particular, has led to novel and powerful approaches to integrating optical elements and biological fluids on the same chip-scale system. Here, we review the state-of-the-art in optofluidic research with emphasis on applications in bioanalysis and a focus on waveguide-based approaches that represent the most advanced level of integration between optics and fluidics. We discuss recent work in photonically reconfigurable devices and various application areas. We show how optofluidic approaches have been pushing the performance limits in bioanalysis, e.g. in terms of sensitivity and portability, satisfying many of the key requirements for point-of-care devices. This illustrates how the requirements for bianalysis instruments are increasingly being met by the symbiotic integration of novel photonic capabilities in a miniaturized system.

Optofluidic biosensors have become an important medical diagnostic tool because they allow for rapid, high-sensitivity testing of small samples compared to standard lab testing. For these devices, the practicality of use in a medical setting depends heavily on both the sensitivity of the device and the ease of alignment of passive chips to a light source. This paper uses a model previously validated by comparison to physical devices to compare alignment, power loss, and signal quality for windowed, laser line, and laser spot methods of top-down illumination. [ABSTRACT FROM AUTHOR]

This paper outlines the use of charge detection mass spectrometry to simultaneously measure the charge and mass of micron-sized particles. In a flow-through instrument, the detection of charge was achieved through charge induction onto cylindrical electrodes that connect to a differential amplifier. Mass was determined by particle acceleration under the influence of an electric field. Particles ranging from 30 to 400 fg (3 to 7 µm diameter) were tested. The detector design can measure particle mass within 10% accuracy for particles up to 620 fg with total charge ranging from 500e− to 56 ke−. This charge and mass range are expected to be relevant for dust on Mars. [ABSTRACT FROM AUTHOR]

We present a new technique for fabricating compliant mechanisms from stamped metal sheets. The concept works by providing thinned segments to allow rotation of flexural beams 90 deg about their long axis, effectively providing a flexure as wide as the sheet's thickness. The method is demonstrated with the design and fabrication of a metal bistable mechanism for use as a threshold accelerometer. A new model based on elliptic integral solutions is presented for bistable mechanisms incorporating long, thin flexures. The resulting metal bistable mechanisms are tested for acceleration threshold sensing using a drop test and a vibration test. The mechanisms demonstrate very little variation due to stress relaxation or temperature effects. The force-displacement behavior of a mechanism is also measured. The mechanisms' switching force is less than the designed value because of out-of-plane motion and dynamic effects. [DOI: 10.1115/1.4001876]

A solid-state impact-ionization multiplier (SIM) is designed for amplifying signals from arbitrary current sources through impact ionization. The causes and effects of poor impact ionization in the planar SIM design are described along with the fabrication process and benefits of introducing an insulator in the SIM to control the path of injected electrons.

We report the design and performance of a novel radio-frequency (RF) ion-trap mass analyzer, the planar Paul trap, in which a quadrupolar potential distribution is made between two electrode plates. Each plate consists of a series of concentric, lithographically deposited 100-[micro]m-wide metal rings, overlaid with a thin resistive layer. A different RF amplitude is applied to each ring, such that the trapping field produced is similar to that of the conventional Paul trap. The accuracy and shape of the electric fields in this trap are not limited by electrode geometry nor machining precision, as is the case in traps made with metal electrodes. The use of two microfabricated plates for ion trap construction presents a lower-cost alternative to conventional ion traps, with additional advantages in electrode alignment, electric field optimization, and ion-trap miniaturization. Experiments demonstrate the effects of ion ejection mode and scan rate on mass resolution for several small organic compounds. The current instrument has a mass range up to ~180 Thomsons (Th), with better than unit mass resolution over the entire range.

A Solid-state Impact-ionization Multiplier (SIM) design that injects electrons into the SIM's depletion region through a p-n junction node instead of through a Schottky contact as in previous versions is proposed. It is observed that the measured gain characteristics are similar to simulated results, and measured frequency response could improve the SIM's performance with lower currents inputs.

Scanning (electrical) impedance imaging (SII) is a novel high-resolution imaging modality that has the potential of imaging the electrical properties of thin biological tissues. In this paper, we apply the reciprocity principle to the modeling of the SII system and develop a fast nonlinear inverse method for image reconstruction. The method is fast because it uses convolution to eliminate the requirement of a numerical solver for the 3-D electrostatic field in the SII system. Numerical results show that our approach can accurately reveal the exact conductivity distribution from the measured current map for different 2-D simulation phantoms. Experiments were also performed using our SH system for a piece of butterfly wing and breast cancer cells. Two-dimensional current images were measured and corresponding quantitative conductivity images were restored using our approach. The reconstructed images are quantitative and reveal details not present in the measured images. Index Terms--Biomedical impedance imaging, image reconstruction, impedance imaging.