1. A Metal-Oxide Contact to ε-Ga2O3 Epitaxial Films and Relevant Conduction Mechanism
- Author
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Maura Pavesi, Antonella Parisini, Alessio Bosio, Salvatore Vantaggio, Carmine Borelli, and Roberto Fornari
- Subjects
010302 applied physics ,Materials science ,business.industry ,Oxide ,02 engineering and technology ,021001 nanoscience & nanotechnology ,Thermal conduction ,Epitaxy ,01 natural sciences ,Electrical contacts ,Electronic, Optical and Magnetic Materials ,Metal ,chemistry.chemical_compound ,chemistry ,Phase (matter) ,visual_art ,0103 physical sciences ,visual_art.visual_art_medium ,Optoelectronics ,Thin film ,0210 nano-technology ,business ,Ohmic contact - Abstract
In this work, the conduction mechanisms across novel contacts to epitaxial films of pure phase epsilon-Ga2O3 (ε-Ga2O3) were investigated. Different structures made by sputtered metal and oxide thin films were tested as electrical contacts. I-V characteristics show heterogeneous behaviors, revealing different conduction mechanisms according to the applied bias. The results are interesting as they offer a viable method to obtain ohmic contacts on ε-Ga2O3, which is less studied than other gallium oxide polymorphs but may find application in new electronic and optoelectronic devices. The newly developed ohmic contacts allow to fabricate simple test devices and assess the potential of this material.
- Published
- 2020
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