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Voltage contrast varies if the specimen voltage changes within the secondary electron transit time through the specimen electric field. This effect would affect the time resolution in stroboscopic scanning electron microscopy. The method to calculate the transit time effect that was described in a previous paper is reviewed. The calculated results agreed well with the experiment in which a specially designed specimen is used to estimate the applied voltage as exactly as possible.

The principle of Stroboscopic SEM is described at first. Then the function-testing of the microprocessor 8085 A is reported, where new measurement methods are applied. SEM micrographs can be taken for a specimen with passivation, if the accelerating voltage of electrons is low and if the measurement is carried out within a certain short time. The measured time properties for the microprocessor with passivation agree well with those without it, within the experimental errors.