Search

Etch bias is a key parameter to determine AEICD performance, and the photo rework is a routine method if photo process abnormal. Dependence of etch bias on photo rework is firstly found and studied in this work. By theoretical analysis and experimental verification, the model of the this dependence is proposed, which mainly attributes to the new dense OX film left below Barc after rework and the high selectivity of Barc to OX for Barc open step. Under the above two conditions, part of plasma convert its etch direction from vertical to horizontal during the OX open period, which attributes to trimming Barc CD, and thus changing etch bias. This dependence gets weaker when transmission rate increases due to macro-loading effect. Besides, it also gets stronger for dense pattern than for iso pattern, which attributes to micro-loading effect. While this dependence may induce AEICD and thus the WAT shift, solution to weaken the side effect of etch bias shift is proposed.

As a key material for manufacturing EAST lower divertor heat sink, high-quality CuCrZr/316 L bonding plate is preferred to be manufactured by explosive welding, which is advantageous in zero input heat without deteriorating the material performance of CuCrZr and 316 L. In accordance with various detections and analyses of CuCrZr/316 L after the explosive welding: metallographic phase and electron microscope analysis showed the bonding interface contains no cavity or Cu/Fe metallic mutual dissolution; tensile stress of the bonding interface is higher than that of the CuCrZr material; a hollow heat sink sample (3 mm wall thickness) made of this material can withstand 4.5 MPa water pressure without deformation or leakage, and has been successfully undergone helium leak detection (200℃, 1 MPa, 1 × 10−11 m3/s). Such test results showed the bonding plate by explosive welding met all high quality requirements on fusion engineering that it can be applied to EAST divertor reliably.

Ethernet Passive Optical Network (abbreviated as EPON) has gained a lot of attention as an effective solution to broadband local access network. While it is a very cost-effective solution, it has some key technologies needed to develop, including upstream traffic synchronization. In the upstream direction, EPON is a multipoint-to-point network. In this paper, we present the principle and simulation of upstream synchronization, a process of finding a specific delay for every network unit, such that all upstream transmissions will arrive at the central office without collisions.

To accurately segment putamen with fuzzy edges of basal ganglia region in brain Magnetic Resonance (MR) images, a shortest path based interactive segmentation method is proposed in this paper. Considering anatomical features of putamen, a cost function is designed by using weight coefficients in sub-regions and sub-orientations, and the shortest path search is restrained in a region, so that the fuzzy edges of putamen can be identified effectively. The proposed method solves the problem of Live-wire, which is easy to be attracted by the edge of claustrum in detecting edge of putamen. A great deal of experiments demonstrates that proposed method can realize fast segmentation with accuracy and stability for putamen.

For finite geometry low-density parity-check codes, heavy row and column weights in their parity check matrix make the decoding with even Min-Sum (MS) variants computationally expensive. To alleviate it, we present a class of hybrid schemes by concatenating a parallel bit flipping (BF) variant with an Min-Sum (MS) variant. In most SNR region of interest, without compromising performance or convergence rate, simulation results show that the proposed hybrid schemes can save substantial computational complexity with respect to MS variant decoding alone. Specifically, the BF variant, with much less computational complexity, bears most decoding load before resorting to MS variant. Computational and hardware complexity is also elaborated to justify the feasibility of the hybrid schemes., Comment: 19 pages, 5 figures, 5 tables