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2. Homo and hetero epitaxy of Germanium using isobutylgermane

Author

Attolini G., Bosi M., Musayeva N., Pelosi C., Ferrari C., Arumainathan S., and Timò L.

Subjects
MOVPE, Germanium, Surfactant
Abstract

Nominally undoped Ge epitaxial layers were deposited on Ge and GaAs substrates by means of Metal-Organic Vapor Phase (MOVPE) using a novel Germanium source, isobutylgermane (iBuGe), by Rohm and Haas Electronic Materials LLC (USA). High Resolution X-ray Diffraction, Atomic Force Microscopy and Raman spectroscopy were combined to characterize the layers. Ge layers were deposited using AsH3 as a surfactant and several growth procedures were tested. The use of arsine reduced the growth rate and also significantly improved the epitaxial quality and surface roughness.

Published
2008

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