1. Multiple epitaxial lateral overgrowth of GaN thin films using a patterned graphene mask by metal organic chemical vapor deposition
- Author
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Mun-Do Park, Jung-Hong Min, Si-Young Bae, Jeong-Hwan Park, Jun Yeob Lee, Chang-Mo Kang, Dong-Seon Lee, and Woo-Lim Jeong
- Subjects
Materials science ,business.industry ,Graphene ,Gallium nitride ,02 engineering and technology ,Chemical vapor deposition ,010402 general chemistry ,021001 nanoscience & nanotechnology ,Epitaxy ,01 natural sciences ,General Biochemistry, Genetics and Molecular Biology ,0104 chemical sciences ,law.invention ,chemistry.chemical_compound ,Full width at half maximum ,chemistry ,law ,Optoelectronics ,Thin film ,0210 nano-technology ,business ,Electron backscatter diffraction ,Wurtzite crystal structure - Abstract
Single-crystal gallium nitride (GaN) thin films were grown using a graphene mask via multiple epitaxial lateral overgrowth (multiple-ELOG). During the growth process, the graphene mask self-decomposed to enable the emergence of a GaN film with a thickness of several hundred nanometres. This is in contrast to selective area growth of GaN using an SiO2 mask leading to the well known hexagonal-pyramid shape under the same growth conditions. The multiple-ELOG GaN had a single-crystalline wurtzite structure corresponding to the crystallinity of the GaN template, which was confirmed with electron backscatter diffraction measurements. An X-ray diffraction rocking curve of the asymmetric 102 reflection showed that the FWHM for the multiple-ELOG GaN decreased to 405 from 540′′ for the underlying GaN template. From these results, the self-decomposition of the graphene mask during ELOG was experimentally proven to be affected by the GaN decomposition rather than the high-temperature/H2 growth conditions.
- Published
- 2020
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