1. Low-temperature growth of piezoceramic films on glass
- Author
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Song, Longfei, Cardoletti, Juliette, Martinez, Alfredo Blazquez, Bencan, Andreja, Kmet, Brigita, Girod, Stephanie, Defay, Emmanuel, and Glinsek, Sebastjan
- Subjects
Condensed Matter - Materials Science ,Materials Science (cond-mat.mtrl-sci) ,FOS: Physical sciences ,Physics - Applied Physics ,Applied Physics (physics.app-ph) - Abstract
Integration of thin-film oxide piezoelectrics on glass is imperative for the next generation of transparent electronics to attain sensing and actuating functions. However, their crystallization temperature (above 650 {\deg}C) is incompatible with most commercial glasses. Guided by finite element analysis, we developed a low-temperature flash lamp process for direct growth of piezoelectric lead zirconate titanate films. The process enables crystallization on various types of glasses in a few seconds only. Ferroelectric, dielectric and piezoelectric properties (e$_{33,f}$ of -5 C m$^{-2}$) of these films are comparable to the properties of films processed with standard rapid thermal annealing at 700 {\deg}C. To demonstrate applicability, a surface haptic device was fabricated with a 1 $\unicode{x00B5}$m-thick film. Its ultrasonic surface deflection reached 1.5 $\unicode{x00B5}$m at 60 V, which is sufficient for its use in surface rendering applications. This demonstrated flash lamp annealing process is compatible with large glass sheets and roll-to-roll processing and, therefore, has the potential to significantly expand the applications of piezoelectric devices on glass., Comment: 33 pages, 18 figures
- Published
- 2023
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