1. Hybrid PLD technique for nitrogen rich CN/sub x/ layers
- Author
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Ján Lančok, V. Perina, Anna Macková, Miroslav Jelinek, D. Chvostova, Jiri Bulir, and M. Simeckova
- Subjects
chemistry.chemical_classification ,Materials science ,Band gap ,Analytical chemistry ,chemistry.chemical_element ,Nitrogen ,Cathode ,Pulsed laser deposition ,law.invention ,chemistry ,law ,Compounds of carbon ,Excitation ,Deposition (law) ,Stoichiometry - Abstract
Summary form only given. In research of proposed superhard /spl beta/-C/sub 3/N/sub 4/ layers with pulsed laser deposition (PLD) technique a problem arises of how to reach high nitrogen content in layers. Using PLD only, N/C ratio usually does not exceed values of 0.5-0.7. In our new deposition arrangement, in which PLD is combined with additional radiofrequency (13 56 MHz, 300 W) and hollow cathode discharges for nitrogen excitation, an N/C of around 1 was reached.
- Published
- 2002
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