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1. STUDY OF VALENCE-BAND PROPERTIES IN a-Si1-xCx:H BY UV PHOTO-ELECTRON SPECTROSOPY

Author

Chen Guang-Hua, Xu Xixiang, Zhang Fangqing, Qi Shang-kui, Jiang Zhi-Chen, and Chen Zhen-shi

Subjects
General Physics and Astronomy
Abstract

We studied the valence-band (VB) spectra of hydfogenated amorphous silieon-earbon alloy film (a-Si C:H:) by means of UPS technique and analysed the influence of doping and surface oxidation on VB spectra. Accompanied with XPS and AES analysis, we preliminarily investigated the distribution and bonding property of valence electrons in the alloy films.

Published
1986

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