1. CARACTERIZACIÓN DE PELÍCULAS DELGADAS DE CARBURO DE TUNGSTENO (W-C) OBTENIDAS POR EL MÉTODO DE CO-SPUTTERING.
- Author
-
Caicedo, J. M., Ramirez, N., Yate, L., Ipaz, L., Caicedo, J. C., García, J., Zambrano, G., and Prieto, P.
- Subjects
- *
THIN films , *TUNGSTEN compounds , *MAGNETRONS , *ARGON , *X-ray spectroscopy , *FOURIER transform infrared spectroscopy - Abstract
Tungsten Carbide (W-C) thin films were obtained by r.f. (13.56 MHz) magnetron co-sputtering process in a argon background gas, from a mosaic targets of carbon C (99.9%) and tungsten W (99.9%) with different W and C concentrations. The thin films were deposited at temperatures between 300 and 500°C onto the silicon (100) and AISI D3 steel substrates. Energy Dispersive X-ray spectroscopy analysis showed that the different hexagonal WC and orthorhombic W2C subcarbide obtained phases, directly depended of tungsten concentration in the mosaic targets, and of the deposition temperature. Fourier Transform Infrared Spectroscopy (FTIR) results of films deposited from different mosaic targets reveled the presence of a peak at 1730 cm-1 associated to the C=O, carbonyls groups and a width band centered near 1340 cm-1 in which are two modes of cubic and hexagonal phases of WC at 1144 and 1220 cm-1, respectively. [ABSTRACT FROM AUTHOR]
- Published
- 2006