1. XPS ANALYSIS OF DIAMOND-LIKE CARBON FILMS
- Author
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Roman V. Pigulev, Konstantin I. Sidorov, Vitaliy A. Tarala, Sergey V. Lisitsyn, Elena N. Belyaeva, and Maria V. Moskvicheva
- Subjects
аморфный гидрогенезированный углерод ,спектры рентгеновские фотоэлек-тронные ,микрокристаллический ,нанокристаллический ,ультрананокристаллический ,аморфный ,amorphous hydrogenised carbon ,x-ray photoelectron spectra ,microcrystalline ,nanocrystalline ,ultra-nanocrystalline ,amorphous ,Economics as a science ,HB71-74 - Abstract
The paper presents an analysis of the results of a study into diamond-like carbon films synthesized by plasma-chemical deposition from hydrocarbon sources: methane (СН4) and ethane (С2Н6). Analysis of the spectra of X-ray photoelectron spectroscopy was employed to study the effect that the synthesis conditions have on the structure and composition of amorphous carbon films.
- Published
- 2022