1. Properties and practical application of thin CeOx films
- Author
-
Maksimchuk N. V., Shmyreva A. N., and Borisov A. V.
- Subjects
CeOx thin films ,biosensor systems ,photoresistors ,MIS photodiodes ,ion-selective field-effect transistors ,MIS varactors ,bioluminescence ,pH registration ,Electrical engineering. Electronics. Nuclear engineering ,TK1-9971 - Abstract
The properties of CeOx films produced by various methods have been investigated. According to the comparative analisys “metallic mirror oxidation” method allows to produce films with significantly better characteristics than the «explosive evaporation» method. Though the latter method yields higher photosensitivity of CeOx films and structures on their base. In the process the optimal value of the substrate temperature was determined. Obtained data expand the CeOx application potential in microelectronic sensor sphere.
- Published
- 2010