1. بررسی تاثیر تنش های موضعی بر روی دیافراگم سیلیکانی طرح دار روی حسگرهای پیزوالکتریک نانو سیم های اکسید روی.
- Author
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حامد کاوند, جواد کوهسرخی, and رضا عسکری مقدم
- Subjects
PIEZOELECTRIC materials ,PIEZOELECTRIC detectors ,NANOSTRUCTURED materials ,FOREIGN bodies ,STRAINS & stresses (Mechanics) - Abstract
The electrical properties of nanostructured piezoelectric materials have attracted the attention of many researchers in the last decade. These features are used in piezoelectric micro-sensors. Mechanical propulsion is usually the result of contact between a piezoelectric surface and a foreign object. In this paper, the effect of mechanical propulsion using an air wave (sound) or vacuum on a silicon diaphragm is investigated. The local stresses created on the diaphragm due to the impact of an air wave have a significant effect on the peak-to-peak voltage of the piezoelectric sensor, which can be measured by measuring changes in this parameter. To investigate this, a micromachined diaphragm of silicon was examined and it was found that fabricating a piezoelectric sensor on a thin and patterned diaphragm could increase the peak-to-peak voltage by about 1.3 times. Detection of these stresses using piezoelectric material layered on the thin and formable diaphragm can act as a piezoelectric microphone or a barometer that the presence of microstructures on the diaphragm will increase their sensitivity. [ABSTRACT FROM AUTHOR]
- Published
- 2023