1. 반사방지 나노 구조체를이용한 AlGaN UV 광다이오드의 광반응도향상.
- Author
-
Duc Chu Dac, 최준행, 김정진, and 차호영
- Subjects
SOLAR receivers ,WAVELENGTHS ,OPTICAL communications ,ETCHING ,ANTIREFLECTIVE coatings - Abstract
In this study, we proposed an anti-reflective nano-structure to improve the photoresponsivity of AlGaN UV photodiode that can be used as a receiver in a solar blind UV optical communication system. The anti-reflective nano-structure was fabricated by forming Ni nano-clusters on SiO
2 film followed by etching the underneath SiO2 film. A sample with the anti-reflective nano-structure exhibited lower surface reflection along with less dependency on the wavelength in comparison with a sample without the nano-structure. Finally, a UV photodiode was fabricated by applying an anti-reflective structure produced by heat-treating a 2 nm-thick Ni layer. The photodiode fabricated with the proposed nano-structure exhibited noticeable improvement in the photoresponsivity at the wavelength range from 240 nm to 270 nm in comparison with the same photodiode with a SiO2 film without the nano-structure. [ABSTRACT FROM AUTHOR]- Published
- 2020
- Full Text
- View/download PDF