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放射光X線の集光光学系を作製し,微小部での蛍光X線測定が可能な走査型X線顕微鏡を開発した.この顕微鏡により極微量の元素について蛍光X線法による定性,定量分析が可能であるだけでなく,X線吸収端微細構造(XAFS)スペクトルから局所での化学状態に関する情報を得ることができる.本論文では作製した顕微鏡についてX線集光光学系,検出限界,微量不純物の状態分析への応用を取り上げるとともに,放射光のエネルギー可変性を利用した蛍光X線定量分析法,蛍光X線収量法でのXAFS測定における自己吸収効果についても取り上げる., A scanning X-ray microprobe using synchrotron radiation was developed employing an X-ray focusing system with total reflection mirrors. Utilizing a Wolter mirror system, a hard X-ray microbeam was first realized. With an energy tunable X-ray microprobe, sensitivity in X-ray fluorescence (XRF) analysis can be optimized for the element of interest at less than 1 ppm in relative concentration. Moreover, small area X-ray absorption fine structure (XAFS) measurements with XRF detection can provide chemical state information about a trace element in a sample. To fully utilize the X-ray microprobe, an XRF quantification method for intermediate thick samples was proposed and the effects of self-absorption in the XRF yield XAFS measurements were discussed.

放射光X線の集光光学系を作製し,微小部での蛍光X線測定が可能な走査型X線顕微鏡を開発した.この顕微鏡により極微量の元素について蛍光X線法による定性,定量分析が可能であるだけでなく,X線吸収端微細構造(XAFS)スペクトルから局所での化学状態に関する情報を得ることができる.本論文では作製した顕微鏡についてX線集光光学系,検出限界,微量不純物の状態分析への応用を取り上げるとともに,放射光のエネルギー可変性を利用した蛍光X線定量分析法,蛍光X線収量法でのXAFS測定における自己吸収効果についても取り上げる., A scanning X-ray microprobe using synchrotron radiation was developed employing an X-ray focusing system with total reflection mirrors. Utilizing a Wolter mirror system, a hard X-ray microbeam was first realized. With an energy tunable X-ray microprobe, sensitivity in X-ray fluorescence (XRF) analysis can be optimized for the element of interest at less than 1 ppm in relative concentration. Moreover, small area X-ray absorption fine structure (XAFS) measurements with XRF detection can provide chemical state information about a trace element in a sample. To fully utilize the X-ray microprobe, an XRF quantification method for intermediate thick samples was proposed and the effects of self-absorption in the XRF yield XAFS measurements were discussed.