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Potential of electric field measurements in processing plasmas by laser diagnostics was studied from the spectroscopic point of view, and laser-induced fluorescence (LIF) was shown to have much promise, in particular with types of the transition of 1II-1∑ and 2II-2∑. For the former, measurable ranges of electric field for given dipole moment μ and splitting in wave-nmber q, and of molecular density for a given optical setup, were shown. In addition, problem areas of laser optogalvanic measurements were referred.