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FePt thin films with L10 ordered structure are candidates for high-density magnetic recording media because of their high uniaxial magnetic anisotropy energy. The (Fe0.395Pt0.395Cu0.15P0.02Pd0.04)100-xSbx thin films with various x were deposited directly on quartz glass substrates by a sputtering method. FePt ordered alloy thin films with (001) preferential orientation were achieved in Sb content of x ≥ 8.0 at.% with post-annealing at 600°C for 1 hour under reduced pressure in a H2 atmosphere. However, the coercivity of these thin films decreased dramatically due to growing of the crystal grains. Therefore, in this study, we prepared the PdSb-FePt-(C4F8)n granular thin films to improve the coercivity. The Fe0.44Pt0.44Pd0.04Sb0.08-(C4F8)n granular thin film deposited at C4F8 partial pressure of 0.1 mTorr then annealed at 700°C for 1 hour under reduced pressure in a H2 atmosphere exhibited a large coercivity of 30 kOe. [ABSTRACT FROM AUTHOR]