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There are various rock mass structures in the overlying strata of the goaf, such as cavities, cracks and separation layers. The phenomenon of under compaction with these structures still exists. Under the action of various natural forces, loads and other external forces, the broken rock mass in the relatively balanced goaf will produce structural deformation and compaction, resulting in surface subsidence. This paper expounds the surface subsidence of goaf from the aspects of surface subsidence mechanism, evaluation of surface stability of goaf and influencing factors of tower foundation stability, which provides a theoretical basis for the treatment of goaf.