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Vacuum induction melting (VIM) and vacuum arc remelting (VAR) methods were used to produce biocompatible Ti-Nb-based alloys. In case of VIM BeO was used as material of crucible, and copper mold cup in case of VAR. Superelastic biocompatible Ti-22Nb-3Ta-3Zr, Ti-22Nb-6Ta and Ti-22Nb-6Zr (at %) alloys were produced. Samples of obtained alloys were investigated by scanning electron microscopy with XRSMA. It was shown that bulk chemical compositions of all VAR alloys exactly corresponded to their nominal chemical compositions. Element distribution maps showed that there was significant chemical inhomogeneity in VIM samples. On the other hand, VAR samples had no such areas and all elements were distributed homogeneously.