1. OXIDE-PASSIVATED SILICON p-n JUNCTION PARTICLE DETECTORS
- Author
-
Frederick S. Goulding and William L. Hansen
- Subjects
Materials science ,Silicon ,business.industry ,Instrumentation ,Detector ,Oxide ,chemistry.chemical_element ,Nanotechnology ,General Medicine ,chemistry.chemical_compound ,Semiconductor ,chemistry ,Diffusion process ,Optoelectronics ,Diffusion (business) ,business ,p–n junction - Abstract
A manufacturing process for passivated p-n junction detectors is described. The role of oxygen during the diffusion process is emphasized; careful control of oxygen is a feature of the process. The results obtained justify the belief that this technique may result in the availability of cheap high-quality detectors, which may make possible the construction of large detector arrays.
- Published
- 1964