4 results on '"Wahl, Jeremy A."'
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2. Reduction of "dark gate" defects in replacement-metal-gate process and middle-of-line contacts for advanced planar CMOS and FinFET technology.
3. Modifications of growth of strained silicon and dopant activation in silicon by cryogenic ion implantation and recrystallization annealing.
4. Lack of charge offset drift is a robust property of Si single electron transistors.
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