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One of the recent topics of optical measurement techniques is the generation and utilization of the “Terahertz wave (THz wave)”. In the long history of the research on electromagnetic waves, it remains as the last unrevealed area because its generation and detection techniques have not been sufficiently developed. In recent years, some useful and convenient devices have become commercially available, and much related research is being carried out. One important feature of THz wave is the high transmission probability through some opaque materials, many of which are dielectric materials through which a visible light beam cannot pass. Solid insulating materials are usually opaque dielectric materials, and it is difficult to measure their interior by conventional optical measurement techniques. If THz wave can pass through an insulating material sufficiently, the same measurement technique as with a visible light beam, already developed and practically applied, such as the technique of utilizing polarization, will become applicable. In this chapter, the research work on the introduction of THz wave techniques to the internal measurement of solid insulating materials is reviewed [1,2].