1. Large linear micromirror array for UV femtosecond laser pulse shaping
- Author
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Severin Waldis, Jean-Pierre Wolf, N. F. de Rooij, Denis Kiselev, W. Noell, Stefan Weber, Jérôme Extermann, and Luigi Bonacina
- Subjects
Femtosecond pulse shaping ,SOI ,Biomolecules ,Micromirror device ,Materials science ,business.industry ,Silicon on insulator ,Physics::Optics ,ddc:500.2 ,Laser ,Vertical comb drive ,law.invention ,Amplitude modulation ,Optics ,UV-NIR femtosecond laser pulse shaping ,law ,Femtosecond ,Micromirror ,business ,Actuator ,Phase modulation ,Timed DRIE - Abstract
We are fabricating a bulk-micromachined micromirror device for laser pulse shaping applications on femtosecond time scales. An array of micromirrors is used to individually retard or diminish certain laser frequencies spanning from the UV to the near-infrared. The individual mirrors are fixed by two springs on either side and can be tilted (amplitude modulation) or moved out-of plane (phase modulation) using asymmetrical or symmetrical vertical comb drives, respectively.
- Published
- 2008