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One particularly interesting approach for the deposition of highly pure nanoparticles (NPs) in a solvent‐ and surfactant‐free process is the gas phase synthesis of nanoparticles using a gas aggregation source (GAS) based on magnetron sputtering. Apart from the possibility of tuning the NP size‐distribution via process parameters, e.g., gas flow, pressure, and aggregation length, multicomponent targets in a GAS enable in operando composition tuning of alloy NPs. However, in the practical application of the GAS, two main challenges have to be addressed: low target utilization and low conversion efficiency. This work describes a magnetron with a concentrically moveable erosion zone (cMEZ magnetron), and showcases its applicability for the deposition of metal (Cu) and metal alloy (CuNi) NPs via GAS. The cMEZ magnetron relies on an in operando reconfigurable outer magnet array, which enables tuning of the position of the erosion zone, impacting target utilization. By weighting the targets and substrates before and after deposition, the conversion efficiency is determined for different operating pressures and magnet configurations. Furthermore, the multicomponent target approach is tested with the cMEZ magnetron, which enabled the in operando composition tuning of the Ni content in CuNi NPs from ≈5 to ≈35 at% only by varying the magnetic field. [ABSTRACT FROM AUTHOR]

Gas phase synthesis of nanoparticles (NPs) via magnetron sputtering in a gas aggregation source (GAS) has become a well‐established method since its conceptualization three decades ago. NP formation is commonly described in terms of nucleation, growth, and transport alongside the gas stream. However, the NP formation and transport involve complex non‐equilibrium processes, which are still the subject of investigation. The development of in situ investigation techniques such as UV–Vis spectroscopy and small angle X‐ray scattering enabled further insights into the dynamic processes inside the GAS and have recently revealed NP trapping at different distances from the magnetron source. The main drawback of these techniques is their limited spatial resolution. To understand the spatio‐temporal behavior of NP trapping, an in situ laser light scattering technique is applied in this study. By this approach, silver NPs are made visible inside the GAS with good spatial and temporal resolution. It is found that the argon gas pressure, as well as different gas inlet configurations, have a strong impact on the trapping behavior of NPs inside the GAS. The different gas inlet configurations not only affect the trapping of NPs, but also the size distribution and deposition rate of NPs. [ABSTRACT FROM AUTHOR]

A radio frequency (RF) hollow discharge configuration is presented, which makes use of a combination of RF plasma generation and the hollow cathode effect. The system was especially designed for the treatment of nanoparticles, plasma polymerization, and nanocomposite fabrication. The process gas streams through the plasma in the inner of the cylindrical electrode system. In the here presented measurements, pure argon and argon with oxygen admixtures are exemplarily used. The discharge is characterized by probe measurements in the effluent, electrical measurements of the discharge parameters, and visual observations of the plasma glow. It is found that the RF fluctuations of the plasma potential are weak. The plasma potential resembles the one of a DC hollow cathode discharge, the RF hollow electrode acts as a cathode due to the self-bias, and a high voltage sheath forms in its inner cylinder. [ABSTRACT FROM AUTHOR]