Author: "Kasperkiewicz, Ewa" / Language: english - Searchworks@Jio Institute Digital Library Search Results

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Your search keyword '"Kasperkiewicz, Ewa"' showing total 3 results

Start Over Author "Kasperkiewicz, Ewa" Language english

3 results on '"Kasperkiewicz, Ewa"'

1. 3rd-order spherochromatism surface contribution and its intrinsic and induced aberration parts.

Author: Berner, Andrea, Kasperkiewicz, Ewa, Yueqian Zhang, and Gross, Herbert
Published: 2018
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2. Direct correlation between mask registration and on-wafer measurements for individual logic device features.

Author: van Haren, Richard, Steinert, Steffen, Mouraille, Orion, Kasperkiewicz, Ewa, Hermans, Jan, Hasan, Mahmudul, van Dijk, Leon, and Beyer, Dirk
Published: 2022
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3. Edge placement error wafer mapping and investigation for improvement in advanced DRAM node.

Author: Adan, Ofer, Robinson, John C., Chen, Kuan-Ming, Henke, Wolfgang, Jung, Ji-Hoon, Kasperkiewicz, Ewa, Bouma, Anita, Rahman, Rizvi, Isai, Gratiela, Kim, Gwang-Gon, Tsiachris, Sotirios, Yoo, Jae-Doug, Park, Yuna, Park, JaeYoung, Won, Jonggeun, Oh, Nang-Lyeom, Chen, Hsin-Yu, Lin, WeiTai, Hsieh, Chih-Hung, and Pao, Kuo-Feng
Published: 2020
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