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A novel stress suppression design for flexible RF MEMS switches has been presented and demonstrated through theoretical and experimental research to isolate the stress caused by substrate bending. An RF MEMS switch with an S-shaped microspring structure was fabricated by the two-step etching process as a developmental step toward miniaturization and high reliability. The RF MEMS switches with an S-shaped microspring exhibited superior microwave performance and stable driving voltage under different substrate curvatures compared to the conventional non-microspring switches, demonstrating that the bending stress is successfully suppressed by the S-shaped microspring and the island structure. Furthermore, this innovative design could be easily extended to other flexible devices. [ABSTRACT FROM AUTHOR]

A novel design method based on a novel origami process that can create a solid structure swiftly and at a low cost is presented for rectangular waveguide-type microwave devices in this paper. A planar structure was fabricated by the lamination and laser cutting of polystyrene membranes and aluminum foils and was converted into a solid structure via origami in accordance with the selective absorption of infrared light. A rectangular waveguide, a rectangular waveguide-type coupler, and a power divider based on an origami structure with a multi-layer structure and a single-layer structure were fabricated and tested, demonstrating easy assembly and good microwave performance. The measured results of the rectangular waveguide indicated that the insertion loss was superior to −0.9 dB. Meanwhile, the results of the coupler showed that the coupling degree increased from −12.8 dB to −8.9 dB in the range of 11.0 GHz to 12.0 GHz. Correspondingly, the prepared power divider demonstrated that the return loss dwindled from −8.9 dB to −11.3 dB and that the insertion loss of one output port was approximate to that of the remaining one, varying between −3.5 dB and −5.2 dB in the range of 10.5 GHz to 11.5 GHz—verifying the effectiveness of the origami-based design method. [ABSTRACT FROM AUTHOR]