1. Smart and quantitative near-infrared point-diffraction interferometer based on the self-referencing wavefront sensor
- Author
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朱健强 Zhu Jianqiang, Wolfgang Brandner, Stefan Hippler, 杨朋千 Yang Pengqian, Sarah Kendrew, 张艳丽 Zhang Yanli, Casey Deen, and 缪洁 Miao Jie
- Subjects
Physics ,Point diffraction interferometer ,Optics ,business.industry ,Near-infrared spectroscopy ,ComputingMethodologies_IMAGEPROCESSINGANDCOMPUTERVISION ,Wavefront sensor ,Electrical and Electronic Engineering ,business ,Atomic and Molecular Physics, and Optics ,Electronic, Optical and Magnetic Materials - Abstract
This paper describes the development of a novel infrared point-diffraction interferometer (IPDI), which can be readily applied to real-time quantitative phase measurement. We generate reference wave with the help of Michelson-like unit combined with a low-pass spatial filter, and extract the phase information using windowed Fourier transform algorithm from single off-axis fringes. The arrangement of the proposed setup offers a quasi-common-path geometry, which could significantly minimize the systematic errors. The proposed method of IPDI is effective and sufficient for the dynamic process measurement of small deformation with higher spatial resolution compared with the conventional off-axis scheme. The feasibility of the proposed setup is demonstrated, followed by methods of reconstruction and system calibration. The nanoscale repeatability is achieved in our experiment.
- Published
- 2013