1. Low-Loss 5-GHz First-Order Antisymmetric Mode Acoustic Delay Lines in Thin-Film Lithium Niobate.
- Author
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Lu, Ruochen, Yang, Yansong, Link, Steffen, and Gong, Songbin
- Subjects
DELAY lines ,SOUND waves ,INSERTION loss (Telecommunication) ,LITHIUM niobate ,THIN films ,MICROELECTROMECHANICAL systems - Abstract
In this work, we present the low-loss acoustic delay lines (ADLs) at 5 GHz, using the first-order antisymmetric (A1) mode in 128° Y-cut lithium niobate thin films. The ADLs use a single-phase unidirectional transducer (SPUDT) design with a feature size of quarter acoustic wavelength. The design space is analytically explored and experimentally validated. The fabricated miniature A1 ADLs with a feature size of $0.45~\mu \text{m}$ show a high operating frequency at 5.4 GHz, a minimum insertion loss (IL) of 3 dB, a fractional bandwidth (FBW) of 1.6%, and a small footprint of 0.0074 mm2. The low IL and high operating frequency have significantly surpassed the state-of-the-art performance of ADLs. The propagation characteristics of A1 acoustic waves have also been extracted. The demonstrated designs can lead to low-loss and high-frequency transversal filters for future 5G applications in the sub-6-GHz bands. [ABSTRACT FROM AUTHOR]
- Published
- 2021
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